Magnification inferred curvature for real-time curvature monitoring

Abstract The in situ and real-time measurement of curvature changes of optically reflecting surfaces is a key element to better control bottom-up fabrication processes in the semiconductor industry, but also to follow or adjust mirror deformations during fabrication and use for space or optics indus...

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Auteurs principaux:	Alexandre Arnoult, Jonathan Colin
Format:	article
Langue:	EN
Publié:	Nature Portfolio 2021
Sujets:	Medicine R Science Q
Accès en ligne:	https://doaj.org/article/70043f881fba4b61bd17f230cd26d878
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spelling	oai:doaj.org-article:70043f881fba4b61bd17f230cd26d8782021-12-02T13:41:00ZMagnification inferred curvature for real-time curvature monitoring10.1038/s41598-021-88722-62045-2322https://doaj.org/article/70043f881fba4b61bd17f230cd26d8782021-04-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-88722-6https://doaj.org/toc/2045-2322Abstract The in situ and real-time measurement of curvature changes of optically reflecting surfaces is a key element to better control bottom-up fabrication processes in the semiconductor industry, but also to follow or adjust mirror deformations during fabrication and use for space or optics industries. Despite progresses made in the last two decades thanks to laser deflectometry-based techniques, the community lacks an instrument, easy to use, robust to tough environments and easily compatible with a large range of fabrication processes. We describe here a new method, called magnification inferred curvature (MIC), based on the determination of the magnification factor of the virtual image size of a known object created by a reflecting curved surface (the substrate) acting as a spherical mirror. The optical formalism, design, and proof of concept are presented. The precision, accuracy, and advantages of the MIC method are illustrated from selected examples taken from real-time growth monitoring and compared with state-of-the-art laser deflectometry-based instruments.Alexandre ArnoultJonathan ColinNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-11 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Alexandre Arnoult Jonathan Colin Magnification inferred curvature for real-time curvature monitoring
description	Abstract The in situ and real-time measurement of curvature changes of optically reflecting surfaces is a key element to better control bottom-up fabrication processes in the semiconductor industry, but also to follow or adjust mirror deformations during fabrication and use for space or optics industries. Despite progresses made in the last two decades thanks to laser deflectometry-based techniques, the community lacks an instrument, easy to use, robust to tough environments and easily compatible with a large range of fabrication processes. We describe here a new method, called magnification inferred curvature (MIC), based on the determination of the magnification factor of the virtual image size of a known object created by a reflecting curved surface (the substrate) acting as a spherical mirror. The optical formalism, design, and proof of concept are presented. The precision, accuracy, and advantages of the MIC method are illustrated from selected examples taken from real-time growth monitoring and compared with state-of-the-art laser deflectometry-based instruments.
format	article
author	Alexandre Arnoult Jonathan Colin
author_facet	Alexandre Arnoult Jonathan Colin
author_sort	Alexandre Arnoult
title	Magnification inferred curvature for real-time curvature monitoring
title_short	Magnification inferred curvature for real-time curvature monitoring
title_full	Magnification inferred curvature for real-time curvature monitoring
title_fullStr	Magnification inferred curvature for real-time curvature monitoring
title_full_unstemmed	Magnification inferred curvature for real-time curvature monitoring
title_sort	magnification inferred curvature for real-time curvature monitoring
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/70043f881fba4b61bd17f230cd26d878
work_keys_str_mv	AT alexandrearnoult magnificationinferredcurvatureforrealtimecurvaturemonitoring AT jonathancolin magnificationinferredcurvatureforrealtimecurvaturemonitoring
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Magnification inferred curvature for real-time curvature monitoring

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