Real-Time and Label-Free Chemical Sensor-on-a-chip using Monolithic Si-on-BaTiO3 Mid-Infrared waveguides
Abstract Chip-scale chemical detection is demonstrated by using mid-Infrared (mid-IR) photonic circuits consisting of amorphous silicon (a-Si) waveguides on an epitaxial barium titanate (BaTiO3, BTO) thin film. The highly c-axis oriented BTO film was grown by the pulsed laser deposition (PLD) method...
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| Autores principales: | , , , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Nature Portfolio
2017
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/70763c2b42974c7c9348575ee9e6e238 |
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| Sumario: | Abstract Chip-scale chemical detection is demonstrated by using mid-Infrared (mid-IR) photonic circuits consisting of amorphous silicon (a-Si) waveguides on an epitaxial barium titanate (BaTiO3, BTO) thin film. The highly c-axis oriented BTO film was grown by the pulsed laser deposition (PLD) method and it exhibits a broad transparent window from λ = 2.5 μm up to 7 μm. The waveguide structure was fabricated by the complementary metal–oxide–semiconductor (CMOS) process and a sharp fundamental waveguide mode has been observed. By scanning the spectrum within the characteristic absorption regime, our mid-IR waveguide successfully perform label-free monitoring of various organic solvents. The real-time heptane detection is accomplished by measuring the intensity attenuation at λ = 3.0–3.2 μm, which is associated with -CH absorption. While for methanol detection, we track the -OH absorption at λ = 2.8–2.9 μm. Our monolithic Si-on-BTO waveguides establish a new sensor platform that enables integrated photonic device for label-free chemical detection. |
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