Real-Time and Label-Free Chemical Sensor-on-a-chip using Monolithic Si-on-BaTiO3 Mid-Infrared waveguides

Abstract Chip-scale chemical detection is demonstrated by using mid-Infrared (mid-IR) photonic circuits consisting of amorphous silicon (a-Si) waveguides on an epitaxial barium titanate (BaTiO3, BTO) thin film. The highly c-axis oriented BTO film was grown by the pulsed laser deposition (PLD) method...

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Autores principales:	Tiening Jin, Leigang Li, Bruce Zhang, Hao-Yu Greg Lin, Haiyan Wang, Pao Tai Lin
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/70763c2b42974c7c9348575ee9e6e238
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spelling	oai:doaj.org-article:70763c2b42974c7c9348575ee9e6e2382021-12-02T16:06:48ZReal-Time and Label-Free Chemical Sensor-on-a-chip using Monolithic Si-on-BaTiO3 Mid-Infrared waveguides10.1038/s41598-017-05711-42045-2322https://doaj.org/article/70763c2b42974c7c9348575ee9e6e2382017-07-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-05711-4https://doaj.org/toc/2045-2322Abstract Chip-scale chemical detection is demonstrated by using mid-Infrared (mid-IR) photonic circuits consisting of amorphous silicon (a-Si) waveguides on an epitaxial barium titanate (BaTiO3, BTO) thin film. The highly c-axis oriented BTO film was grown by the pulsed laser deposition (PLD) method and it exhibits a broad transparent window from λ = 2.5 μm up to 7 μm. The waveguide structure was fabricated by the complementary metal–oxide–semiconductor (CMOS) process and a sharp fundamental waveguide mode has been observed. By scanning the spectrum within the characteristic absorption regime, our mid-IR waveguide successfully perform label-free monitoring of various organic solvents. The real-time heptane detection is accomplished by measuring the intensity attenuation at λ = 3.0–3.2 μm, which is associated with -CH absorption. While for methanol detection, we track the -OH absorption at λ = 2.8–2.9 μm. Our monolithic Si-on-BTO waveguides establish a new sensor platform that enables integrated photonic device for label-free chemical detection.Tiening JinLeigang LiBruce ZhangHao-Yu Greg LinHaiyan WangPao Tai LinNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-8 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Tiening Jin Leigang Li Bruce Zhang Hao-Yu Greg Lin Haiyan Wang Pao Tai Lin Real-Time and Label-Free Chemical Sensor-on-a-chip using Monolithic Si-on-BaTiO3 Mid-Infrared waveguides
description	Abstract Chip-scale chemical detection is demonstrated by using mid-Infrared (mid-IR) photonic circuits consisting of amorphous silicon (a-Si) waveguides on an epitaxial barium titanate (BaTiO3, BTO) thin film. The highly c-axis oriented BTO film was grown by the pulsed laser deposition (PLD) method and it exhibits a broad transparent window from λ = 2.5 μm up to 7 μm. The waveguide structure was fabricated by the complementary metal–oxide–semiconductor (CMOS) process and a sharp fundamental waveguide mode has been observed. By scanning the spectrum within the characteristic absorption regime, our mid-IR waveguide successfully perform label-free monitoring of various organic solvents. The real-time heptane detection is accomplished by measuring the intensity attenuation at λ = 3.0–3.2 μm, which is associated with -CH absorption. While for methanol detection, we track the -OH absorption at λ = 2.8–2.9 μm. Our monolithic Si-on-BTO waveguides establish a new sensor platform that enables integrated photonic device for label-free chemical detection.
format	article
author	Tiening Jin Leigang Li Bruce Zhang Hao-Yu Greg Lin Haiyan Wang Pao Tai Lin
author_facet	Tiening Jin Leigang Li Bruce Zhang Hao-Yu Greg Lin Haiyan Wang Pao Tai Lin
author_sort	Tiening Jin
title	Real-Time and Label-Free Chemical Sensor-on-a-chip using Monolithic Si-on-BaTiO3 Mid-Infrared waveguides
title_short	Real-Time and Label-Free Chemical Sensor-on-a-chip using Monolithic Si-on-BaTiO3 Mid-Infrared waveguides
title_full	Real-Time and Label-Free Chemical Sensor-on-a-chip using Monolithic Si-on-BaTiO3 Mid-Infrared waveguides
title_fullStr	Real-Time and Label-Free Chemical Sensor-on-a-chip using Monolithic Si-on-BaTiO3 Mid-Infrared waveguides
title_full_unstemmed	Real-Time and Label-Free Chemical Sensor-on-a-chip using Monolithic Si-on-BaTiO3 Mid-Infrared waveguides
title_sort	real-time and label-free chemical sensor-on-a-chip using monolithic si-on-batio3 mid-infrared waveguides
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/70763c2b42974c7c9348575ee9e6e238
work_keys_str_mv	AT tieningjin realtimeandlabelfreechemicalsensoronachipusingmonolithicsionbatio3midinfraredwaveguides AT leigangli realtimeandlabelfreechemicalsensoronachipusingmonolithicsionbatio3midinfraredwaveguides AT brucezhang realtimeandlabelfreechemicalsensoronachipusingmonolithicsionbatio3midinfraredwaveguides AT haoyugreglin realtimeandlabelfreechemicalsensoronachipusingmonolithicsionbatio3midinfraredwaveguides AT haiyanwang realtimeandlabelfreechemicalsensoronachipusingmonolithicsionbatio3midinfraredwaveguides AT paotailin realtimeandlabelfreechemicalsensoronachipusingmonolithicsionbatio3midinfraredwaveguides
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Real-Time and Label-Free Chemical Sensor-on-a-chip using Monolithic Si-on-BaTiO3 Mid-Infrared waveguides

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