Maskless X-Ray Writing of Electrical Devices on a Superconducting Oxide with Nanometer Resolution and Online Process Monitoring

Abstract X-ray nanofabrication has so far been usually limited to mask methods involving photoresist impression and subsequent etching. Herein we show that an innovative maskless X-ray nanopatterning approach allows writing electrical devices with nanometer feature size. In particular we fabricated...

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Autores principales:	Lorenzo Mino, Valentina Bonino, Angelo Agostino, Carmelo Prestipino, Elisa Borfecchia, Carlo Lamberti, Lorenza Operti, Matteo Fretto, Natascia De Leo, Marco Truccato
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/72b0a100a31f44ed9ef96ffc35bb73d4
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spelling	oai:doaj.org-article:72b0a100a31f44ed9ef96ffc35bb73d42021-12-02T11:40:32ZMaskless X-Ray Writing of Electrical Devices on a Superconducting Oxide with Nanometer Resolution and Online Process Monitoring10.1038/s41598-017-09443-32045-2322https://doaj.org/article/72b0a100a31f44ed9ef96ffc35bb73d42017-08-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-09443-3https://doaj.org/toc/2045-2322Abstract X-ray nanofabrication has so far been usually limited to mask methods involving photoresist impression and subsequent etching. Herein we show that an innovative maskless X-ray nanopatterning approach allows writing electrical devices with nanometer feature size. In particular we fabricated a Josephson device on a Bi2Sr2CaCu2O8+δ (Bi-2212) superconducting oxide micro-crystal by drawing two single lines of only 50 nm in width using a 17.4 keV synchrotron nano-beam. A precise control of the fabrication process was achieved by monitoring in situ the variations of the device electrical resistance during X-ray irradiation, thus finely tuning the irradiation time to drive the material into a non-superconducting state only in the irradiated regions, without significantly perturbing the crystal structure. Time-dependent finite element model simulations show that a possible microscopic origin of this effect can be related to the instantaneous temperature increase induced by the intense synchrotron picosecond X-ray pulses. These results prove that a conceptually new patterning method for oxide electrical devices, based on the local change of electrical properties, is actually possible with potential advantages in terms of heat dissipation, chemical contamination, miniaturization and high aspect ratio of the devices.Lorenzo MinoValentina BoninoAngelo AgostinoCarmelo PrestipinoElisa BorfecchiaCarlo LambertiLorenza OpertiMatteo FrettoNatascia De LeoMarco TruccatoNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-9 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Lorenzo Mino Valentina Bonino Angelo Agostino Carmelo Prestipino Elisa Borfecchia Carlo Lamberti Lorenza Operti Matteo Fretto Natascia De Leo Marco Truccato Maskless X-Ray Writing of Electrical Devices on a Superconducting Oxide with Nanometer Resolution and Online Process Monitoring
description	Abstract X-ray nanofabrication has so far been usually limited to mask methods involving photoresist impression and subsequent etching. Herein we show that an innovative maskless X-ray nanopatterning approach allows writing electrical devices with nanometer feature size. In particular we fabricated a Josephson device on a Bi2Sr2CaCu2O8+δ (Bi-2212) superconducting oxide micro-crystal by drawing two single lines of only 50 nm in width using a 17.4 keV synchrotron nano-beam. A precise control of the fabrication process was achieved by monitoring in situ the variations of the device electrical resistance during X-ray irradiation, thus finely tuning the irradiation time to drive the material into a non-superconducting state only in the irradiated regions, without significantly perturbing the crystal structure. Time-dependent finite element model simulations show that a possible microscopic origin of this effect can be related to the instantaneous temperature increase induced by the intense synchrotron picosecond X-ray pulses. These results prove that a conceptually new patterning method for oxide electrical devices, based on the local change of electrical properties, is actually possible with potential advantages in terms of heat dissipation, chemical contamination, miniaturization and high aspect ratio of the devices.
format	article
author	Lorenzo Mino Valentina Bonino Angelo Agostino Carmelo Prestipino Elisa Borfecchia Carlo Lamberti Lorenza Operti Matteo Fretto Natascia De Leo Marco Truccato
author_facet	Lorenzo Mino Valentina Bonino Angelo Agostino Carmelo Prestipino Elisa Borfecchia Carlo Lamberti Lorenza Operti Matteo Fretto Natascia De Leo Marco Truccato
author_sort	Lorenzo Mino
title	Maskless X-Ray Writing of Electrical Devices on a Superconducting Oxide with Nanometer Resolution and Online Process Monitoring
title_short	Maskless X-Ray Writing of Electrical Devices on a Superconducting Oxide with Nanometer Resolution and Online Process Monitoring
title_full	Maskless X-Ray Writing of Electrical Devices on a Superconducting Oxide with Nanometer Resolution and Online Process Monitoring
title_fullStr	Maskless X-Ray Writing of Electrical Devices on a Superconducting Oxide with Nanometer Resolution and Online Process Monitoring
title_full_unstemmed	Maskless X-Ray Writing of Electrical Devices on a Superconducting Oxide with Nanometer Resolution and Online Process Monitoring
title_sort	maskless x-ray writing of electrical devices on a superconducting oxide with nanometer resolution and online process monitoring
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/72b0a100a31f44ed9ef96ffc35bb73d4
work_keys_str_mv	AT lorenzomino masklessxraywritingofelectricaldevicesonasuperconductingoxidewithnanometerresolutionandonlineprocessmonitoring AT valentinabonino masklessxraywritingofelectricaldevicesonasuperconductingoxidewithnanometerresolutionandonlineprocessmonitoring AT angeloagostino masklessxraywritingofelectricaldevicesonasuperconductingoxidewithnanometerresolutionandonlineprocessmonitoring AT carmeloprestipino masklessxraywritingofelectricaldevicesonasuperconductingoxidewithnanometerresolutionandonlineprocessmonitoring AT elisaborfecchia masklessxraywritingofelectricaldevicesonasuperconductingoxidewithnanometerresolutionandonlineprocessmonitoring AT carlolamberti masklessxraywritingofelectricaldevicesonasuperconductingoxidewithnanometerresolutionandonlineprocessmonitoring AT lorenzaoperti masklessxraywritingofelectricaldevicesonasuperconductingoxidewithnanometerresolutionandonlineprocessmonitoring AT matteofretto masklessxraywritingofelectricaldevicesonasuperconductingoxidewithnanometerresolutionandonlineprocessmonitoring AT natasciadeleo masklessxraywritingofelectricaldevicesonasuperconductingoxidewithnanometerresolutionandonlineprocessmonitoring AT marcotruccato masklessxraywritingofelectricaldevicesonasuperconductingoxidewithnanometerresolutionandonlineprocessmonitoring
_version_	1718395587874783232

Maskless X-Ray Writing of Electrical Devices on a Superconducting Oxide with Nanometer Resolution and Online Process Monitoring

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