Dynamics of laser produced plasma from foam targets for future nanolithography devices and X-ray sources

Abstract Foam targets are expected to be more efficient candidates than solid targets for laser produced plasma (LPP) for extreme ultraviolet (EUV) and X-ray radiation sources due to the expected plasma conditions that can be optimized regarding plasma opacities, volumetrics heating effects, and the...

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Autores principales:	Yaoxing Wu, Girik Jain, Tatyana Sizyuk, Xinbing Wang, Ahmed Hassanein
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/75d85d18f5fb4b0c8435a2f8422b20b0
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spelling	oai:doaj.org-article:75d85d18f5fb4b0c8435a2f8422b20b02021-12-02T16:10:36ZDynamics of laser produced plasma from foam targets for future nanolithography devices and X-ray sources10.1038/s41598-021-93193-w2045-2322https://doaj.org/article/75d85d18f5fb4b0c8435a2f8422b20b02021-07-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-93193-whttps://doaj.org/toc/2045-2322Abstract Foam targets are expected to be more efficient candidates than solid targets for laser produced plasma (LPP) for extreme ultraviolet (EUV) and X-ray radiation sources due to the expected plasma conditions that can be optimized regarding plasma opacities, volumetrics heating effects, and the produced ions debris characteristics. In this paper, a comparison of ion dynamics between low-density foam and solid Ni plasma was systematically investigated at CMUXE. The foam Ni target (density 0.6 g/cm3) and solid Ni target (density 8.9 g/cm3) were irradiated with 1064 nm Nd:YAG laser in vacuum. A Faraday cup (FC) was used to record the ion flux and time-of-flight (TOF) signals. A lower and wider TOF signal was observed for foam Ni plasma on the time scale. The average ion energy and peak of the TOF signal of solid Ni plasma were much higher than that of the foam Ni plasma. However, the total charge values between foam and solid Ni plasma were comparable indicating a more volumetric absorption of laser energy for foam Ni. The average ion energy and peak of the TOF signal of solid Ni showed a stronger angular and laser energy dependence than that of foam Ni. The plume shape of the solid Ni plasma appeared as an oblong ellipse at each time, while that of foam Ni plasma tended to be more circular, especially at early times. The results of mass ablation rate were consistent with the FC signals and showed a more intense plasma shielding for solid Ni.Yaoxing WuGirik JainTatyana SizyukXinbing WangAhmed HassaneinNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-14 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Yaoxing Wu Girik Jain Tatyana Sizyuk Xinbing Wang Ahmed Hassanein Dynamics of laser produced plasma from foam targets for future nanolithography devices and X-ray sources
description	Abstract Foam targets are expected to be more efficient candidates than solid targets for laser produced plasma (LPP) for extreme ultraviolet (EUV) and X-ray radiation sources due to the expected plasma conditions that can be optimized regarding plasma opacities, volumetrics heating effects, and the produced ions debris characteristics. In this paper, a comparison of ion dynamics between low-density foam and solid Ni plasma was systematically investigated at CMUXE. The foam Ni target (density 0.6 g/cm3) and solid Ni target (density 8.9 g/cm3) were irradiated with 1064 nm Nd:YAG laser in vacuum. A Faraday cup (FC) was used to record the ion flux and time-of-flight (TOF) signals. A lower and wider TOF signal was observed for foam Ni plasma on the time scale. The average ion energy and peak of the TOF signal of solid Ni plasma were much higher than that of the foam Ni plasma. However, the total charge values between foam and solid Ni plasma were comparable indicating a more volumetric absorption of laser energy for foam Ni. The average ion energy and peak of the TOF signal of solid Ni showed a stronger angular and laser energy dependence than that of foam Ni. The plume shape of the solid Ni plasma appeared as an oblong ellipse at each time, while that of foam Ni plasma tended to be more circular, especially at early times. The results of mass ablation rate were consistent with the FC signals and showed a more intense plasma shielding for solid Ni.
format	article
author	Yaoxing Wu Girik Jain Tatyana Sizyuk Xinbing Wang Ahmed Hassanein
author_facet	Yaoxing Wu Girik Jain Tatyana Sizyuk Xinbing Wang Ahmed Hassanein
author_sort	Yaoxing Wu
title	Dynamics of laser produced plasma from foam targets for future nanolithography devices and X-ray sources
title_short	Dynamics of laser produced plasma from foam targets for future nanolithography devices and X-ray sources
title_full	Dynamics of laser produced plasma from foam targets for future nanolithography devices and X-ray sources
title_fullStr	Dynamics of laser produced plasma from foam targets for future nanolithography devices and X-ray sources
title_full_unstemmed	Dynamics of laser produced plasma from foam targets for future nanolithography devices and X-ray sources
title_sort	dynamics of laser produced plasma from foam targets for future nanolithography devices and x-ray sources
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/75d85d18f5fb4b0c8435a2f8422b20b0
work_keys_str_mv	AT yaoxingwu dynamicsoflaserproducedplasmafromfoamtargetsforfuturenanolithographydevicesandxraysources AT girikjain dynamicsoflaserproducedplasmafromfoamtargetsforfuturenanolithographydevicesandxraysources AT tatyanasizyuk dynamicsoflaserproducedplasmafromfoamtargetsforfuturenanolithographydevicesandxraysources AT xinbingwang dynamicsoflaserproducedplasmafromfoamtargetsforfuturenanolithographydevicesandxraysources AT ahmedhassanein dynamicsoflaserproducedplasmafromfoamtargetsforfuturenanolithographydevicesandxraysources
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Dynamics of laser produced plasma from foam targets for future nanolithography devices and X-ray sources

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