Dynamics of laser produced plasma from foam targets for future nanolithography devices and X-ray sources

Abstract Foam targets are expected to be more efficient candidates than solid targets for laser produced plasma (LPP) for extreme ultraviolet (EUV) and X-ray radiation sources due to the expected plasma conditions that can be optimized regarding plasma opacities, volumetrics heating effects, and the...

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Bibliographic Details
Main Authors: Yaoxing Wu, Girik Jain, Tatyana Sizyuk, Xinbing Wang, Ahmed Hassanein
Format: article
Language:EN
Published: Nature Portfolio 2021
Subjects:
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Online Access:https://doaj.org/article/75d85d18f5fb4b0c8435a2f8422b20b0
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