Ultrahigh-Q optomechanical crystal cavities fabricated in a CMOS foundry

Abstract Photonic crystals use periodic structures to create frequency regions where the optical wave propagation is forbidden, which allows the creation and integration of complex optical functionalities in small footprint devices. Such strategy has also been successfully applied to confine mechani...

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Autores principales: Rodrigo Benevides, Felipe G. S. Santos, Gustavo O. Luiz, Gustavo S. Wiederhecker, Thiago P. Mayer Alegre
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2017
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Acceso en línea:https://doaj.org/article/791e9467497c41e2a960f8782c8cb5d0
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