Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO<sub>2</sub>/IDT/LiNbO<sub>3</sub>/Diamond/Si

Surface acoustic wave (SAW) devices are widely used in many fields such as mobile communication, phased array radar, and wireless passive sensor systems. With the upgrade of mobile networks, the requirements for the performance of SAW devices have also increased, and high-frequency wideband SAW devi...

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Autores principales:	Hanqiang Zhang, Hongliang Wang
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	surface acoustic wave (SAW) temperature compensation layered structure finite element method (FEM) filter Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/7bdf407ee10242d78694c6b38021d18c
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spelling	oai:doaj.org-article:7bdf407ee10242d78694c6b38021d18c2021-11-25T18:22:48ZInvestigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO<sub>2</sub>/IDT/LiNbO<sub>3</sub>/Diamond/Si10.3390/mi121112862072-666Xhttps://doaj.org/article/7bdf407ee10242d78694c6b38021d18c2021-10-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1286https://doaj.org/toc/2072-666XSurface acoustic wave (SAW) devices are widely used in many fields such as mobile communication, phased array radar, and wireless passive sensor systems. With the upgrade of mobile networks, the requirements for the performance of SAW devices have also increased, and high-frequency wideband SAW devices have become an important research topic in communication systems and other application fields. In this paper, a theoretical study for the realization of a layered SAW filter based on a new SiO<sub>2</sub>/IDT/128°YX-LiNbO<sub>3</sub>/diamond/silicon layered structure using the modeling software COMSOL Multiphysics is presented. The effects of lithium niobate (LiNbO<sub>3</sub>), an interdigital transducer (IDT), and SiO<sub>2</sub> thin films on the evolution of the phase velocity, electromechanical coupling coefficient (k<sup>2</sup>), and temperature coefficient of frequency were studied by employing a finite element method simulation. Furthermore, a longitudinal coupling resonator filter was designed. To investigate the SAW characteristics of the filter, a transient analysis was conducted to calculate the electrical potential and particle displacement under the resonance condition and to analyze the frequency response. The study concluded that this new multilayer structure can be applied to design and manufacture a variety of high-frequency and wideband SAW filters with a temperature compensation function, for operation above the GHz range.Hanqiang ZhangHongliang WangMDPI AGarticlesurface acoustic wave (SAW)temperature compensationlayered structurefinite element method (FEM)filterMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1286, p 1286 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	surface acoustic wave (SAW) temperature compensation layered structure finite element method (FEM) filter Mechanical engineering and machinery TJ1-1570
spellingShingle	surface acoustic wave (SAW) temperature compensation layered structure finite element method (FEM) filter Mechanical engineering and machinery TJ1-1570 Hanqiang Zhang Hongliang Wang Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO<sub>2</sub>/IDT/LiNbO<sub>3</sub>/Diamond/Si
description	Surface acoustic wave (SAW) devices are widely used in many fields such as mobile communication, phased array radar, and wireless passive sensor systems. With the upgrade of mobile networks, the requirements for the performance of SAW devices have also increased, and high-frequency wideband SAW devices have become an important research topic in communication systems and other application fields. In this paper, a theoretical study for the realization of a layered SAW filter based on a new SiO<sub>2</sub>/IDT/128°YX-LiNbO<sub>3</sub>/diamond/silicon layered structure using the modeling software COMSOL Multiphysics is presented. The effects of lithium niobate (LiNbO<sub>3</sub>), an interdigital transducer (IDT), and SiO<sub>2</sub> thin films on the evolution of the phase velocity, electromechanical coupling coefficient (k<sup>2</sup>), and temperature coefficient of frequency were studied by employing a finite element method simulation. Furthermore, a longitudinal coupling resonator filter was designed. To investigate the SAW characteristics of the filter, a transient analysis was conducted to calculate the electrical potential and particle displacement under the resonance condition and to analyze the frequency response. The study concluded that this new multilayer structure can be applied to design and manufacture a variety of high-frequency and wideband SAW filters with a temperature compensation function, for operation above the GHz range.
format	article
author	Hanqiang Zhang Hongliang Wang
author_facet	Hanqiang Zhang Hongliang Wang
author_sort	Hanqiang Zhang
title	Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO<sub>2</sub>/IDT/LiNbO<sub>3</sub>/Diamond/Si
title_short	Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO<sub>2</sub>/IDT/LiNbO<sub>3</sub>/Diamond/Si
title_full	Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO<sub>2</sub>/IDT/LiNbO<sub>3</sub>/Diamond/Si
title_fullStr	Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO<sub>2</sub>/IDT/LiNbO<sub>3</sub>/Diamond/Si
title_full_unstemmed	Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO<sub>2</sub>/IDT/LiNbO<sub>3</sub>/Diamond/Si
title_sort	investigation of surface acoustic wave propagation characteristics in new multilayer structure: sio<sub>2</sub>/idt/linbo<sub>3</sub>/diamond/si
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/7bdf407ee10242d78694c6b38021d18c
work_keys_str_mv	AT hanqiangzhang investigationofsurfaceacousticwavepropagationcharacteristicsinnewmultilayerstructuresiosub2subidtlinbosub3subdiamondsi AT hongliangwang investigationofsurfaceacousticwavepropagationcharacteristicsinnewmultilayerstructuresiosub2subidtlinbosub3subdiamondsi
_version_	1718411267483369472

Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO<sub>2</sub>/IDT/LiNbO<sub>3</sub>/Diamond/Si

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