Spatially controlled epitaxial growth of 2D heterostructures via defect engineering using a focused He ion beam
Abstract The combination of two-dimensional (2D) materials into heterostructures enables the formation of atomically thin devices with designed properties. To achieve a high-density, bottom-up integration, the growth of these 2D heterostructures via van der Waals epitaxy (vdWE) is an attractive alte...
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Autores principales: | , , , , |
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Formato: | article |
Lenguaje: | EN |
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Nature Portfolio
2021
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Materias: | |
Acceso en línea: | https://doaj.org/article/7d8dd893fc92480bb120e784c652f030 |
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