Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology

Fully integratable spectrometers have trade-offs between size and resolution. Here, the authors present a nano-opto-electro-mechanical system where the functionalities of transduction, actuation and detection are fully integrated, resulting in an ultra-compact high-resolution spectrometer with a mic...

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Autores principales:	Žarko Zobenica, Rob W. van der Heijden, Maurangelo Petruzzella, Francesco Pagliano, Rick Leijssen, Tian Xia, Leonardo Midolo, Michele Cotrufo, YongJin Cho, Frank W. M. van Otten, Ewold Verhagen, Andrea Fiore
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Science Q
Acceso en línea:	https://doaj.org/article/806ae8ecf4664563af37128cf6ec5d82
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spelling	oai:doaj.org-article:806ae8ecf4664563af37128cf6ec5d822021-12-02T17:06:06ZIntegrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology10.1038/s41467-017-02392-52041-1723https://doaj.org/article/806ae8ecf4664563af37128cf6ec5d822017-12-01T00:00:00Zhttps://doi.org/10.1038/s41467-017-02392-5https://doaj.org/toc/2041-1723Fully integratable spectrometers have trade-offs between size and resolution. Here, the authors present a nano-opto-electro-mechanical system where the functionalities of transduction, actuation and detection are fully integrated, resulting in an ultra-compact high-resolution spectrometer with a micrometer-scale footprint.Žarko ZobenicaRob W. van der HeijdenMaurangelo PetruzzellaFrancesco PaglianoRick LeijssenTian XiaLeonardo MidoloMichele CotrufoYongJin ChoFrank W. M. van OttenEwold VerhagenAndrea FioreNature PortfolioarticleScienceQENNature Communications, Vol 8, Iss 1, Pp 1-8 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Science Q
spellingShingle	Science Q Žarko Zobenica Rob W. van der Heijden Maurangelo Petruzzella Francesco Pagliano Rick Leijssen Tian Xia Leonardo Midolo Michele Cotrufo YongJin Cho Frank W. M. van Otten Ewold Verhagen Andrea Fiore Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology
description	Fully integratable spectrometers have trade-offs between size and resolution. Here, the authors present a nano-opto-electro-mechanical system where the functionalities of transduction, actuation and detection are fully integrated, resulting in an ultra-compact high-resolution spectrometer with a micrometer-scale footprint.
format	article
author	Žarko Zobenica Rob W. van der Heijden Maurangelo Petruzzella Francesco Pagliano Rick Leijssen Tian Xia Leonardo Midolo Michele Cotrufo YongJin Cho Frank W. M. van Otten Ewold Verhagen Andrea Fiore
author_facet	Žarko Zobenica Rob W. van der Heijden Maurangelo Petruzzella Francesco Pagliano Rick Leijssen Tian Xia Leonardo Midolo Michele Cotrufo YongJin Cho Frank W. M. van Otten Ewold Verhagen Andrea Fiore
author_sort	Žarko Zobenica
title	Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology
title_short	Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology
title_full	Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology
title_fullStr	Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology
title_full_unstemmed	Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology
title_sort	integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/806ae8ecf4664563af37128cf6ec5d82
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Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology

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