Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology
Fully integratable spectrometers have trade-offs between size and resolution. Here, the authors present a nano-opto-electro-mechanical system where the functionalities of transduction, actuation and detection are fully integrated, resulting in an ultra-compact high-resolution spectrometer with a mic...
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| Autores principales: | , , , , , , , , , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Nature Portfolio
2017
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/806ae8ecf4664563af37128cf6ec5d82 |
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