Discrimination of Surface Topographies Created by Two-Stage Process by Means of Multiscale Analysis
The fundamental issue in surface metrology is to provide methods that can allow the establishment of correlations between measured topographies and performance or processes, or that can discriminate confidently topographies that are processed or performed differently. This article presents a set of...
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| Main Authors: | , , , |
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| Format: | article |
| Language: | EN |
| Published: |
MDPI AG
2021
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| Subjects: | |
| Online Access: | https://doaj.org/article/81f35c26fec445ed9a73a8e086802a0d |
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