High-performance ITO thin films for on-cell touch sensor of foldable OLED displays
ITO thin films must have good electro-optical and mechanical characteristics to use them as integrated touch sensors for flexible OLED displays. We fabricated ITO thin films on a separation-layer-coated glass substrate under various deposition or annealing conditions, and then transferred them to cy...
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| Autores principales: | , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Taylor & Francis Group
2021
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/820d21a0814149c497389ddb890194bd |
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| Sumario: | ITO thin films must have good electro-optical and mechanical characteristics to use them as integrated touch sensors for flexible OLED displays. We fabricated ITO thin films on a separation-layer-coated glass substrate under various deposition or annealing conditions, and then transferred them to cyclo-olefin polymer films to evaluate their electro-optical and mechanical characteristics. ITO films with a thickness of approximately 136 nm deposited at 250°C showed a sheet resistance of 36 Ω/□, light transmittance of 88%, and 2.4% of elongation at break. The 136 nm thick ITO films deposited at 150 °C and transferred on 50 μm thick COP film survived 500 h of 85 °C, 85% relative humidity under 180-degree bending preservation test, endured at 200,000-time repetitive bending test with a curvature radius of 1.5 mm. These high-performance ITO thin films can be applied to fabricate on-cell touch sensors for foldable OLED displays. |
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