High-performance ITO thin films for on-cell touch sensor of foldable OLED displays

ITO thin films must have good electro-optical and mechanical characteristics to use them as integrated touch sensors for flexible OLED displays. We fabricated ITO thin films on a separation-layer-coated glass substrate under various deposition or annealing conditions, and then transferred them to cy...

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Autores principales:	Dong-pil Park, Won-hyeok Park, Jang-kun Song, Sang Soo Kim
Formato:	article
Lenguaje:	EN
Publicado:	Taylor & Francis Group 2021
Materias:	ito elongation at break bending preservation test repetitive bending test touch sensor Computer engineering. Computer hardware TK7885-7895
Acceso en línea:	https://doaj.org/article/820d21a0814149c497389ddb890194bd
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spelling	oai:doaj.org-article:820d21a0814149c497389ddb890194bd2021-11-26T11:19:47ZHigh-performance ITO thin films for on-cell touch sensor of foldable OLED displays1598-03162158-160610.1080/15980316.2021.1999867https://doaj.org/article/820d21a0814149c497389ddb890194bd2021-11-01T00:00:00Zhttp://dx.doi.org/10.1080/15980316.2021.1999867https://doaj.org/toc/1598-0316https://doaj.org/toc/2158-1606ITO thin films must have good electro-optical and mechanical characteristics to use them as integrated touch sensors for flexible OLED displays. We fabricated ITO thin films on a separation-layer-coated glass substrate under various deposition or annealing conditions, and then transferred them to cyclo-olefin polymer films to evaluate their electro-optical and mechanical characteristics. ITO films with a thickness of approximately 136 nm deposited at 250°C showed a sheet resistance of 36 Ω/□, light transmittance of 88%, and 2.4% of elongation at break. The 136 nm thick ITO films deposited at 150 °C and transferred on 50 μm thick COP film survived 500 h of 85 °C, 85% relative humidity under 180-degree bending preservation test, endured at 200,000-time repetitive bending test with a curvature radius of 1.5 mm. These high-performance ITO thin films can be applied to fabricate on-cell touch sensors for foldable OLED displays.Dong-pil ParkWon-hyeok ParkJang-kun SongSang Soo KimTaylor & Francis Grouparticleitoelongation at breakbending preservation testrepetitive bending testtouch sensorComputer engineering. Computer hardwareTK7885-7895ENJournal of Information Display, Vol 0, Iss 0, Pp 1-9 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	ito elongation at break bending preservation test repetitive bending test touch sensor Computer engineering. Computer hardware TK7885-7895
spellingShingle	ito elongation at break bending preservation test repetitive bending test touch sensor Computer engineering. Computer hardware TK7885-7895 Dong-pil Park Won-hyeok Park Jang-kun Song Sang Soo Kim High-performance ITO thin films for on-cell touch sensor of foldable OLED displays
description	ITO thin films must have good electro-optical and mechanical characteristics to use them as integrated touch sensors for flexible OLED displays. We fabricated ITO thin films on a separation-layer-coated glass substrate under various deposition or annealing conditions, and then transferred them to cyclo-olefin polymer films to evaluate their electro-optical and mechanical characteristics. ITO films with a thickness of approximately 136 nm deposited at 250°C showed a sheet resistance of 36 Ω/□, light transmittance of 88%, and 2.4% of elongation at break. The 136 nm thick ITO films deposited at 150 °C and transferred on 50 μm thick COP film survived 500 h of 85 °C, 85% relative humidity under 180-degree bending preservation test, endured at 200,000-time repetitive bending test with a curvature radius of 1.5 mm. These high-performance ITO thin films can be applied to fabricate on-cell touch sensors for foldable OLED displays.
format	article
author	Dong-pil Park Won-hyeok Park Jang-kun Song Sang Soo Kim
author_facet	Dong-pil Park Won-hyeok Park Jang-kun Song Sang Soo Kim
author_sort	Dong-pil Park
title	High-performance ITO thin films for on-cell touch sensor of foldable OLED displays
title_short	High-performance ITO thin films for on-cell touch sensor of foldable OLED displays
title_full	High-performance ITO thin films for on-cell touch sensor of foldable OLED displays
title_fullStr	High-performance ITO thin films for on-cell touch sensor of foldable OLED displays
title_full_unstemmed	High-performance ITO thin films for on-cell touch sensor of foldable OLED displays
title_sort	high-performance ito thin films for on-cell touch sensor of foldable oled displays
publisher	Taylor & Francis Group
publishDate	2021
url	https://doaj.org/article/820d21a0814149c497389ddb890194bd
work_keys_str_mv	AT dongpilpark highperformanceitothinfilmsforoncelltouchsensoroffoldableoleddisplays AT wonhyeokpark highperformanceitothinfilmsforoncelltouchsensoroffoldableoleddisplays AT jangkunsong highperformanceitothinfilmsforoncelltouchsensoroffoldableoleddisplays AT sangsookim highperformanceitothinfilmsforoncelltouchsensoroffoldableoleddisplays
_version_	1718409544612184064

High-performance ITO thin films for on-cell touch sensor of foldable OLED displays

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