Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance

Abstract Micro-Electro-Mechanical Systems revolutionized the consumer market for their small dimensions, high performances and low costs. In recent years, the evolution of the Internet of Things is posing new challenges to MEMS designers that have to deal with complex multiphysics systems experienci...

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Autores principales:	Giorgio Gobat, Valentina Zega, Patrick Fedeli, Luca Guerinoni, Cyril Touzé, Attilio Frangi
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/83c01ddb994b4890bd9450723009dac4
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spelling	oai:doaj.org-article:83c01ddb994b4890bd9450723009dac42021-12-02T19:06:40ZReduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance10.1038/s41598-021-95793-y2045-2322https://doaj.org/article/83c01ddb994b4890bd9450723009dac42021-08-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-95793-yhttps://doaj.org/toc/2045-2322Abstract Micro-Electro-Mechanical Systems revolutionized the consumer market for their small dimensions, high performances and low costs. In recent years, the evolution of the Internet of Things is posing new challenges to MEMS designers that have to deal with complex multiphysics systems experiencing highly nonlinear dynamic responses. To be able to simulate a priori and in real-time the behavior of such systems it is thus becoming mandatory to understand the sources of nonlinearities and avoid them when harmful or exploit them for the design of innovative devices. In this work, we present the first numerical tool able to estimate a priori and in real-time the complex nonlinear responses of MEMS devices without resorting to simplified theories. Moreover, the proposed tool predicts different working conditions without the need of ad-hoc calibration procedures. It consists in a nonlinear Model Order Reduction Technique based on the Implicit Static Condensation that allows to condense the high fidelity FEM models into few degrees of freedom, thus greatly speeding-up the solution phase and improving the design process of MEMS devices. In particular, the 1:2 internal resonance experienced in a MEMS gyroscope test-structure fabricated with a commercial process is numerically investigated and an excellent agreement with experiments is found.Giorgio GobatValentina ZegaPatrick FedeliLuca GuerinoniCyril TouzéAttilio FrangiNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-8 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Giorgio Gobat Valentina Zega Patrick Fedeli Luca Guerinoni Cyril Touzé Attilio Frangi Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance
description	Abstract Micro-Electro-Mechanical Systems revolutionized the consumer market for their small dimensions, high performances and low costs. In recent years, the evolution of the Internet of Things is posing new challenges to MEMS designers that have to deal with complex multiphysics systems experiencing highly nonlinear dynamic responses. To be able to simulate a priori and in real-time the behavior of such systems it is thus becoming mandatory to understand the sources of nonlinearities and avoid them when harmful or exploit them for the design of innovative devices. In this work, we present the first numerical tool able to estimate a priori and in real-time the complex nonlinear responses of MEMS devices without resorting to simplified theories. Moreover, the proposed tool predicts different working conditions without the need of ad-hoc calibration procedures. It consists in a nonlinear Model Order Reduction Technique based on the Implicit Static Condensation that allows to condense the high fidelity FEM models into few degrees of freedom, thus greatly speeding-up the solution phase and improving the design process of MEMS devices. In particular, the 1:2 internal resonance experienced in a MEMS gyroscope test-structure fabricated with a commercial process is numerically investigated and an excellent agreement with experiments is found.
format	article
author	Giorgio Gobat Valentina Zega Patrick Fedeli Luca Guerinoni Cyril Touzé Attilio Frangi
author_facet	Giorgio Gobat Valentina Zega Patrick Fedeli Luca Guerinoni Cyril Touzé Attilio Frangi
author_sort	Giorgio Gobat
title	Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance
title_short	Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance
title_full	Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance
title_fullStr	Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance
title_full_unstemmed	Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance
title_sort	reduced order modelling and experimental validation of a mems gyroscope test-structure exhibiting 1:2 internal resonance
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/83c01ddb994b4890bd9450723009dac4
work_keys_str_mv	AT giorgiogobat reducedordermodellingandexperimentalvalidationofamemsgyroscopeteststructureexhibiting12internalresonance AT valentinazega reducedordermodellingandexperimentalvalidationofamemsgyroscopeteststructureexhibiting12internalresonance AT patrickfedeli reducedordermodellingandexperimentalvalidationofamemsgyroscopeteststructureexhibiting12internalresonance AT lucaguerinoni reducedordermodellingandexperimentalvalidationofamemsgyroscopeteststructureexhibiting12internalresonance AT cyriltouze reducedordermodellingandexperimentalvalidationofamemsgyroscopeteststructureexhibiting12internalresonance AT attiliofrangi reducedordermodellingandexperimentalvalidationofamemsgyroscopeteststructureexhibiting12internalresonance
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Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance

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