Controlling Plateau-Rayleigh instabilities during the reorganization of silicon macropores in the Silicon Millefeuille process

Abstract The reorganization through high-temperature annealing of closely-packed pore arrays can be exploited to create ultra-thin (<20 µm) monocrystalline silicon layers that can work as cheap and flexible substrates for both the electronic and the photovoltaic industries. By introducing a perio...

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Autores principales:	M. Garín, C. Jin, D. Cardador, T. Trifonov, R. Alcubilla
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/84b0b059c15c470e8b693dd6a5d29594
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spelling	oai:doaj.org-article:84b0b059c15c470e8b693dd6a5d295942021-12-02T15:05:57ZControlling Plateau-Rayleigh instabilities during the reorganization of silicon macropores in the Silicon Millefeuille process10.1038/s41598-017-07393-42045-2322https://doaj.org/article/84b0b059c15c470e8b693dd6a5d295942017-08-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-07393-4https://doaj.org/toc/2045-2322Abstract The reorganization through high-temperature annealing of closely-packed pore arrays can be exploited to create ultra-thin (<20 µm) monocrystalline silicon layers that can work as cheap and flexible substrates for both the electronic and the photovoltaic industries. By introducing a periodic diameter modulation along deep etched pores, many thin layers can be produced from a single substrate and in a single technological process. Besides the periodicity, the exact shape of the modulation also has a profound impact on the process and subtle profile changes can lead to important differences on the process outcome. In this paper we study both theoretically and experimentally the effect of the initial profile on the pore reorganization dynamics and the morphology of the thin layers obtained through annealing. We show that process reliability, annealing time and final layer characteristics, all can be engineered and optimized by precisely controlling the initial pore profile.M. GarínC. JinD. CardadorT. TrifonovR. AlcubillaNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-11 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q M. Garín C. Jin D. Cardador T. Trifonov R. Alcubilla Controlling Plateau-Rayleigh instabilities during the reorganization of silicon macropores in the Silicon Millefeuille process
description	Abstract The reorganization through high-temperature annealing of closely-packed pore arrays can be exploited to create ultra-thin (<20 µm) monocrystalline silicon layers that can work as cheap and flexible substrates for both the electronic and the photovoltaic industries. By introducing a periodic diameter modulation along deep etched pores, many thin layers can be produced from a single substrate and in a single technological process. Besides the periodicity, the exact shape of the modulation also has a profound impact on the process and subtle profile changes can lead to important differences on the process outcome. In this paper we study both theoretically and experimentally the effect of the initial profile on the pore reorganization dynamics and the morphology of the thin layers obtained through annealing. We show that process reliability, annealing time and final layer characteristics, all can be engineered and optimized by precisely controlling the initial pore profile.
format	article
author	M. Garín C. Jin D. Cardador T. Trifonov R. Alcubilla
author_facet	M. Garín C. Jin D. Cardador T. Trifonov R. Alcubilla
author_sort	M. Garín
title	Controlling Plateau-Rayleigh instabilities during the reorganization of silicon macropores in the Silicon Millefeuille process
title_short	Controlling Plateau-Rayleigh instabilities during the reorganization of silicon macropores in the Silicon Millefeuille process
title_full	Controlling Plateau-Rayleigh instabilities during the reorganization of silicon macropores in the Silicon Millefeuille process
title_fullStr	Controlling Plateau-Rayleigh instabilities during the reorganization of silicon macropores in the Silicon Millefeuille process
title_full_unstemmed	Controlling Plateau-Rayleigh instabilities during the reorganization of silicon macropores in the Silicon Millefeuille process
title_sort	controlling plateau-rayleigh instabilities during the reorganization of silicon macropores in the silicon millefeuille process
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/84b0b059c15c470e8b693dd6a5d29594
work_keys_str_mv	AT mgarin controllingplateaurayleighinstabilitiesduringthereorganizationofsiliconmacroporesinthesiliconmillefeuilleprocess AT cjin controllingplateaurayleighinstabilitiesduringthereorganizationofsiliconmacroporesinthesiliconmillefeuilleprocess AT dcardador controllingplateaurayleighinstabilitiesduringthereorganizationofsiliconmacroporesinthesiliconmillefeuilleprocess AT ttrifonov controllingplateaurayleighinstabilitiesduringthereorganizationofsiliconmacroporesinthesiliconmillefeuilleprocess AT ralcubilla controllingplateaurayleighinstabilitiesduringthereorganizationofsiliconmacroporesinthesiliconmillefeuilleprocess
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Controlling Plateau-Rayleigh instabilities during the reorganization of silicon macropores in the Silicon Millefeuille process

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