Progress of shrink polymer micro- and nanomanufacturing

Abstract Traditional lithography plays a significant role in the fabrication of micro- and nanostructures. Nevertheless, the fabrication process still suffers from the limitations of manufacturing devices with a high aspect ratio or three-dimensional structure. Recent findings have revealed that shr...

Descripción completa

Guardado en:

Detalles Bibliográficos
Autores principales:	Wenzheng He, Xiongying Ye, Tianhong Cui
Formato:	article
Lenguaje:	EN
Publicado:	Nature Publishing Group 2021
Materias:	Technology T Engineering (General). Civil engineering (General) TA1-2040
Acceso en línea:	https://doaj.org/article/84e2acee5cda4de2bc51efc41e24e615
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

id	oai:doaj.org-article:84e2acee5cda4de2bc51efc41e24e615
record_format	dspace
spelling	oai:doaj.org-article:84e2acee5cda4de2bc51efc41e24e6152021-11-07T12:12:01ZProgress of shrink polymer micro- and nanomanufacturing10.1038/s41378-021-00312-82055-7434https://doaj.org/article/84e2acee5cda4de2bc51efc41e24e6152021-11-01T00:00:00Zhttps://doi.org/10.1038/s41378-021-00312-8https://doaj.org/toc/2055-7434Abstract Traditional lithography plays a significant role in the fabrication of micro- and nanostructures. Nevertheless, the fabrication process still suffers from the limitations of manufacturing devices with a high aspect ratio or three-dimensional structure. Recent findings have revealed that shrink polymers attain a certain potential in micro- and nanostructure manufacturing. This technique, denoted as heat-induced shrink lithography, exhibits inherent merits, including an improved fabrication resolution by shrinking, controllable shrinkage behavior, and surface wrinkles, and an efficient fabrication process. These merits unfold new avenues, compensating for the shortcomings of traditional technologies. Manufacturing using shrink polymers is investigated in regard to its mechanism and applications. This review classifies typical applications of shrink polymers in micro- and nanostructures into the size-contraction feature and surface wrinkles. Additionally, corresponding shrinkage mechanisms and models for shrinkage, and wrinkle parameter control are examined. Regarding the size-contraction feature, this paper summarizes the progress on high-aspect-ratio devices, microchannels, self-folding structures, optical antenna arrays, and nanowires. Regarding surface wrinkles, this paper evaluates the development of wearable sensors, electrochemical sensors, energy-conversion technology, cell-alignment structures, and antibacterial surfaces. Finally, the limitations and prospects of shrink lithography are analyzed.Wenzheng HeXiongying YeTianhong CuiNature Publishing GrouparticleTechnologyTEngineering (General). Civil engineering (General)TA1-2040ENMicrosystems & Nanoengineering, Vol 7, Iss 1, Pp 1-23 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Technology T Engineering (General). Civil engineering (General) TA1-2040
spellingShingle	Technology T Engineering (General). Civil engineering (General) TA1-2040 Wenzheng He Xiongying Ye Tianhong Cui Progress of shrink polymer micro- and nanomanufacturing
description	Abstract Traditional lithography plays a significant role in the fabrication of micro- and nanostructures. Nevertheless, the fabrication process still suffers from the limitations of manufacturing devices with a high aspect ratio or three-dimensional structure. Recent findings have revealed that shrink polymers attain a certain potential in micro- and nanostructure manufacturing. This technique, denoted as heat-induced shrink lithography, exhibits inherent merits, including an improved fabrication resolution by shrinking, controllable shrinkage behavior, and surface wrinkles, and an efficient fabrication process. These merits unfold new avenues, compensating for the shortcomings of traditional technologies. Manufacturing using shrink polymers is investigated in regard to its mechanism and applications. This review classifies typical applications of shrink polymers in micro- and nanostructures into the size-contraction feature and surface wrinkles. Additionally, corresponding shrinkage mechanisms and models for shrinkage, and wrinkle parameter control are examined. Regarding the size-contraction feature, this paper summarizes the progress on high-aspect-ratio devices, microchannels, self-folding structures, optical antenna arrays, and nanowires. Regarding surface wrinkles, this paper evaluates the development of wearable sensors, electrochemical sensors, energy-conversion technology, cell-alignment structures, and antibacterial surfaces. Finally, the limitations and prospects of shrink lithography are analyzed.
format	article
author	Wenzheng He Xiongying Ye Tianhong Cui
author_facet	Wenzheng He Xiongying Ye Tianhong Cui
author_sort	Wenzheng He
title	Progress of shrink polymer micro- and nanomanufacturing
title_short	Progress of shrink polymer micro- and nanomanufacturing
title_full	Progress of shrink polymer micro- and nanomanufacturing
title_fullStr	Progress of shrink polymer micro- and nanomanufacturing
title_full_unstemmed	Progress of shrink polymer micro- and nanomanufacturing
title_sort	progress of shrink polymer micro- and nanomanufacturing
publisher	Nature Publishing Group
publishDate	2021
url	https://doaj.org/article/84e2acee5cda4de2bc51efc41e24e615
work_keys_str_mv	AT wenzhenghe progressofshrinkpolymermicroandnanomanufacturing AT xiongyingye progressofshrinkpolymermicroandnanomanufacturing AT tianhongcui progressofshrinkpolymermicroandnanomanufacturing
_version_	1718443499439783936

Progress of shrink polymer micro- and nanomanufacturing

Ejemplares similares