Progress of shrink polymer micro- and nanomanufacturing
Abstract Traditional lithography plays a significant role in the fabrication of micro- and nanostructures. Nevertheless, the fabrication process still suffers from the limitations of manufacturing devices with a high aspect ratio or three-dimensional structure. Recent findings have revealed that shr...
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| Auteurs principaux: | , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
Nature Publishing Group
2021
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| Accès en ligne: | https://doaj.org/article/84e2acee5cda4de2bc51efc41e24e615 |
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