A foundation for complex oxide electronics -low temperature perovskite epitaxy
Designing complex oxides with appreciable low-temperature synthesis remains a challenge. Here, the authors demonstrate an atomic layer deposition process for LaNiO3 to enable epitaxial thin films on LaAlO3 and SrTiO3 substrates deposited at 225 °C, with no annealing required to achieve good electron...
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| Main Authors: | , , , , , |
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| Format: | article |
| Language: | EN |
| Published: |
Nature Portfolio
2020
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| Subjects: | |
| Online Access: | https://doaj.org/article/858df9fbe6db442192e21b1321a27b4e |
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