Threshold voltage instability and polyimide charging effects of LTPS TFTs for flexible displays
Abstract In this paper, we investigate the Vth shift of p-type LTPS TFTs fabricated on a polyimide (PI) and glass substrate considering charging phenomena. The Vth of the LTPS TFTs with a PI substrate positively shift after a bias temperature stress test. However, the Vth with a glass substrate rare...
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| Auteurs principaux: | , , , , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
Nature Portfolio
2021
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| Accès en ligne: | https://doaj.org/article/883cbc4ca5e845ac99435f9d4fd1c0c0 |
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| Résumé: | Abstract In this paper, we investigate the Vth shift of p-type LTPS TFTs fabricated on a polyimide (PI) and glass substrate considering charging phenomena. The Vth of the LTPS TFTs with a PI substrate positively shift after a bias temperature stress test. However, the Vth with a glass substrate rarely changed even with increasing stress. Such a positive Vth shift results from the negative charging of fluorine stemmed from the PI under the gate bias. In fact, the C–V characterization on the metal–insulator-metal capacitor reveals that charging at the SiO2/PI interface depends on the applied gate bias and the PI material, which agrees well with the TCAD simulation and SIMS analyses. As a result, the charging at the SiO2/PI interface contributes to the Vth shift of the LTPS TFTs leading to image sticking. |
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