Threshold voltage instability and polyimide charging effects of LTPS TFTs for flexible displays

Abstract In this paper, we investigate the Vth shift of p-type LTPS TFTs fabricated on a polyimide (PI) and glass substrate considering charging phenomena. The Vth of the LTPS TFTs with a PI substrate positively shift after a bias temperature stress test. However, the Vth with a glass substrate rare...

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Autores principales:	Hyojung Kim, Jongwoo Park, Taeyoung Khim, Sora Bak, Jangkun Song, Byoungdeog Choi
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/883cbc4ca5e845ac99435f9d4fd1c0c0
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spelling	oai:doaj.org-article:883cbc4ca5e845ac99435f9d4fd1c0c02021-12-02T14:26:20ZThreshold voltage instability and polyimide charging effects of LTPS TFTs for flexible displays10.1038/s41598-021-87950-02045-2322https://doaj.org/article/883cbc4ca5e845ac99435f9d4fd1c0c02021-04-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-87950-0https://doaj.org/toc/2045-2322Abstract In this paper, we investigate the Vth shift of p-type LTPS TFTs fabricated on a polyimide (PI) and glass substrate considering charging phenomena. The Vth of the LTPS TFTs with a PI substrate positively shift after a bias temperature stress test. However, the Vth with a glass substrate rarely changed even with increasing stress. Such a positive Vth shift results from the negative charging of fluorine stemmed from the PI under the gate bias. In fact, the C–V characterization on the metal–insulator-metal capacitor reveals that charging at the SiO2/PI interface depends on the applied gate bias and the PI material, which agrees well with the TCAD simulation and SIMS analyses. As a result, the charging at the SiO2/PI interface contributes to the Vth shift of the LTPS TFTs leading to image sticking.Hyojung KimJongwoo ParkTaeyoung KhimSora BakJangkun SongByoungdeog ChoiNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-8 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Hyojung Kim Jongwoo Park Taeyoung Khim Sora Bak Jangkun Song Byoungdeog Choi Threshold voltage instability and polyimide charging effects of LTPS TFTs for flexible displays
description	Abstract In this paper, we investigate the Vth shift of p-type LTPS TFTs fabricated on a polyimide (PI) and glass substrate considering charging phenomena. The Vth of the LTPS TFTs with a PI substrate positively shift after a bias temperature stress test. However, the Vth with a glass substrate rarely changed even with increasing stress. Such a positive Vth shift results from the negative charging of fluorine stemmed from the PI under the gate bias. In fact, the C–V characterization on the metal–insulator-metal capacitor reveals that charging at the SiO2/PI interface depends on the applied gate bias and the PI material, which agrees well with the TCAD simulation and SIMS analyses. As a result, the charging at the SiO2/PI interface contributes to the Vth shift of the LTPS TFTs leading to image sticking.
format	article
author	Hyojung Kim Jongwoo Park Taeyoung Khim Sora Bak Jangkun Song Byoungdeog Choi
author_facet	Hyojung Kim Jongwoo Park Taeyoung Khim Sora Bak Jangkun Song Byoungdeog Choi
author_sort	Hyojung Kim
title	Threshold voltage instability and polyimide charging effects of LTPS TFTs for flexible displays
title_short	Threshold voltage instability and polyimide charging effects of LTPS TFTs for flexible displays
title_full	Threshold voltage instability and polyimide charging effects of LTPS TFTs for flexible displays
title_fullStr	Threshold voltage instability and polyimide charging effects of LTPS TFTs for flexible displays
title_full_unstemmed	Threshold voltage instability and polyimide charging effects of LTPS TFTs for flexible displays
title_sort	threshold voltage instability and polyimide charging effects of ltps tfts for flexible displays
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/883cbc4ca5e845ac99435f9d4fd1c0c0
work_keys_str_mv	AT hyojungkim thresholdvoltageinstabilityandpolyimidechargingeffectsofltpstftsforflexibledisplays AT jongwoopark thresholdvoltageinstabilityandpolyimidechargingeffectsofltpstftsforflexibledisplays AT taeyoungkhim thresholdvoltageinstabilityandpolyimidechargingeffectsofltpstftsforflexibledisplays AT sorabak thresholdvoltageinstabilityandpolyimidechargingeffectsofltpstftsforflexibledisplays AT jangkunsong thresholdvoltageinstabilityandpolyimidechargingeffectsofltpstftsforflexibledisplays AT byoungdeogchoi thresholdvoltageinstabilityandpolyimidechargingeffectsofltpstftsforflexibledisplays
_version_	1718391380197244928

Threshold voltage instability and polyimide charging effects of LTPS TFTs for flexible displays

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