Combination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force
The problems of constructing of linear drives with traditional toothed belt transmissions for coordinate systems of technological equipment, used for cutting semiconductor wafers with diamond wheel are discussed. The possibilities of a significant improvement in their dynamic qualities by creating a...
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National Academy of Sciences of Belarus, State Scientific Institution “The Joint Institute of Mechanical Engineering"
2013
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oai:doaj.org-article:8afab8a457bd49d6b3fd9e0dc0bf3bb42021-11-29T13:31:20ZCombination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force1995-04702518-1475https://doaj.org/article/8afab8a457bd49d6b3fd9e0dc0bf3bb42013-09-01T00:00:00Zhttp://mmmm.by/en/readers-en/archive-room-en?layout=edit&id=311https://doaj.org/toc/1995-0470https://doaj.org/toc/2518-1475The problems of constructing of linear drives with traditional toothed belt transmissions for coordinate systems of technological equipment, used for cutting semiconductor wafers with diamond wheel are discussed. The possibilities of a significant improvement in their dynamic qualities by creating a combination actuator wherein in addition to the main motor in the construction is entered another relatively low-powered program-controlled linear electromotor are shown. Its armature is directly connected with the movable table. With help of the linear electromotor additional program-controlled propulsive force is created under its acceleration or braking the table, it eliminates the occurrence of natural vibrations when it reaches cutting feed rate or stop.V.L. Basinyuk E.I. Mardosevich S.S. Papina V.G. Lomako National Academy of Sciences of Belarus, State Scientific Institution “The Joint Institute of Mechanical Engineering"articlewaveringcutting of the semiconductor wafersprogram-controlled gearcontrol propulsive forceMechanical engineering and machineryTJ1-1570ENRUМеханика машин, механизмов и материалов, Iss 3(24), Pp 50-56 (2013) |
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wavering cutting of the semiconductor wafers program-controlled gear control propulsive force Mechanical engineering and machinery TJ1-1570 |
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wavering cutting of the semiconductor wafers program-controlled gear control propulsive force Mechanical engineering and machinery TJ1-1570 V.L. Basinyuk E.I. Mardosevich S.S. Papina V.G. Lomako Combination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force |
description |
The problems of constructing of linear drives with traditional toothed belt transmissions for coordinate systems of technological equipment, used for cutting semiconductor wafers with diamond wheel are discussed. The possibilities of a significant improvement in their dynamic qualities by creating a combination actuator wherein in addition to the main motor in the construction is entered another relatively low-powered program-controlled linear electromotor are shown. Its armature is directly connected with the movable table. With help of the linear electromotor additional program-controlled propulsive force is created under its acceleration or braking the table, it eliminates the occurrence of natural vibrations when it reaches cutting feed rate or stop. |
format |
article |
author |
V.L. Basinyuk E.I. Mardosevich S.S. Papina V.G. Lomako |
author_facet |
V.L. Basinyuk E.I. Mardosevich S.S. Papina V.G. Lomako |
author_sort |
V.L. Basinyuk |
title |
Combination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force |
title_short |
Combination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force |
title_full |
Combination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force |
title_fullStr |
Combination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force |
title_full_unstemmed |
Combination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force |
title_sort |
combination actuator of the linear coordinate system of technological equipment with control propulsive force |
publisher |
National Academy of Sciences of Belarus, State Scientific Institution “The Joint Institute of Mechanical Engineering" |
publishDate |
2013 |
url |
https://doaj.org/article/8afab8a457bd49d6b3fd9e0dc0bf3bb4 |
work_keys_str_mv |
AT vlbasinyuk combinationactuatorofthelinearcoordinatesystemoftechnologicalequipmentwithcontrolpropulsiveforce AT eimardosevich combinationactuatorofthelinearcoordinatesystemoftechnologicalequipmentwithcontrolpropulsiveforce AT sspapina combinationactuatorofthelinearcoordinatesystemoftechnologicalequipmentwithcontrolpropulsiveforce AT vglomako combinationactuatorofthelinearcoordinatesystemoftechnologicalequipmentwithcontrolpropulsiveforce |
_version_ |
1718407358445518848 |