Combination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force

The problems of constructing of linear drives with traditional toothed belt transmissions for coordinate systems of technological equipment, used for cutting semiconductor wafers with diamond wheel are discussed. The possibilities of a significant improvement in their dynamic qualities by creating a...

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Autores principales: V.L. Basinyuk, E.I. Mardosevich, S.S. Papina, V.G. Lomako
Formato: article
Lenguaje:EN
RU
Publicado: National Academy of Sciences of Belarus, State Scientific Institution “The Joint Institute of Mechanical Engineering" 2013
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Acceso en línea:https://doaj.org/article/8afab8a457bd49d6b3fd9e0dc0bf3bb4
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spelling oai:doaj.org-article:8afab8a457bd49d6b3fd9e0dc0bf3bb42021-11-29T13:31:20ZCombination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force1995-04702518-1475https://doaj.org/article/8afab8a457bd49d6b3fd9e0dc0bf3bb42013-09-01T00:00:00Zhttp://mmmm.by/en/readers-en/archive-room-en?layout=edit&id=311https://doaj.org/toc/1995-0470https://doaj.org/toc/2518-1475The problems of constructing of linear drives with traditional toothed belt transmissions for coordinate systems of technological equipment, used for cutting semiconductor wafers with diamond wheel are discussed. The possibilities of a significant improvement in their dynamic qualities by creating a combination actuator wherein in addition to the main motor in the construction is entered another relatively low-powered program-controlled linear electromotor are shown. Its armature is directly connected with the movable table. With help of the linear electromotor additional program-controlled propulsive force is created under its acceleration or braking the table, it eliminates the occurrence of natural vibrations when it reaches cutting feed rate or stop.V.L. Basinyuk E.I. Mardosevich S.S. Papina V.G. Lomako National Academy of Sciences of Belarus, State Scientific Institution “The Joint Institute of Mechanical Engineering"articlewaveringcutting of the semiconductor wafersprogram-controlled gearcontrol propulsive forceMechanical engineering and machineryTJ1-1570ENRUМеханика машин, механизмов и материалов, Iss 3(24), Pp 50-56 (2013)
institution DOAJ
collection DOAJ
language EN
RU
topic wavering
cutting of the semiconductor wafers
program-controlled gear
control propulsive force
Mechanical engineering and machinery
TJ1-1570
spellingShingle wavering
cutting of the semiconductor wafers
program-controlled gear
control propulsive force
Mechanical engineering and machinery
TJ1-1570
V.L. Basinyuk
E.I. Mardosevich
S.S. Papina
V.G. Lomako
Combination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force
description The problems of constructing of linear drives with traditional toothed belt transmissions for coordinate systems of technological equipment, used for cutting semiconductor wafers with diamond wheel are discussed. The possibilities of a significant improvement in their dynamic qualities by creating a combination actuator wherein in addition to the main motor in the construction is entered another relatively low-powered program-controlled linear electromotor are shown. Its armature is directly connected with the movable table. With help of the linear electromotor additional program-controlled propulsive force is created under its acceleration or braking the table, it eliminates the occurrence of natural vibrations when it reaches cutting feed rate or stop.
format article
author V.L. Basinyuk
E.I. Mardosevich
S.S. Papina
V.G. Lomako
author_facet V.L. Basinyuk
E.I. Mardosevich
S.S. Papina
V.G. Lomako
author_sort V.L. Basinyuk
title Combination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force
title_short Combination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force
title_full Combination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force
title_fullStr Combination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force
title_full_unstemmed Combination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force
title_sort combination actuator of the linear coordinate system of technological equipment with control propulsive force
publisher National Academy of Sciences of Belarus, State Scientific Institution “The Joint Institute of Mechanical Engineering"
publishDate 2013
url https://doaj.org/article/8afab8a457bd49d6b3fd9e0dc0bf3bb4
work_keys_str_mv AT vlbasinyuk combinationactuatorofthelinearcoordinatesystemoftechnologicalequipmentwithcontrolpropulsiveforce
AT eimardosevich combinationactuatorofthelinearcoordinatesystemoftechnologicalequipmentwithcontrolpropulsiveforce
AT sspapina combinationactuatorofthelinearcoordinatesystemoftechnologicalequipmentwithcontrolpropulsiveforce
AT vglomako combinationactuatorofthelinearcoordinatesystemoftechnologicalequipmentwithcontrolpropulsiveforce
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