Combination Actuator of the Linear Coordinate System of Technological Equipment with Control Propulsive Force
The problems of constructing of linear drives with traditional toothed belt transmissions for coordinate systems of technological equipment, used for cutting semiconductor wafers with diamond wheel are discussed. The possibilities of a significant improvement in their dynamic qualities by creating a...
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| Main Authors: | , , , |
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| Format: | article |
| Language: | EN RU |
| Published: |
National Academy of Sciences of Belarus, State Scientific Institution “The Joint Institute of Mechanical Engineering"
2013
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| Subjects: | |
| Online Access: | https://doaj.org/article/8afab8a457bd49d6b3fd9e0dc0bf3bb4 |
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