A New Miniaturized Gas Sensor Based on Zener Diode Network Covered by Metal Oxide

The development of “portable, low cost and low consumption” gas microsensors is one of the strong needs for embedded portable devices in many fields such as public domain. In this paper, a new approach is presented on making, on the same chip, a network of head-to-tail facing PN junctions in order t...

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Autores principales:	Vignesh Gunasekaran, Soffian Yjjou, Eve Hennequin, Thierry Camps, Nicolas Mauran, Lionel Presmanes, Philippe Menini
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	miniaturized gas sensor network p-n junction metal oxide RF-sputtering ZnO:Ga thin layer Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/8afca9b6ab7c433196f72ce4ab668d23
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spelling	oai:doaj.org-article:8afca9b6ab7c433196f72ce4ab668d232021-11-25T18:23:21ZA New Miniaturized Gas Sensor Based on Zener Diode Network Covered by Metal Oxide10.3390/mi121113552072-666Xhttps://doaj.org/article/8afca9b6ab7c433196f72ce4ab668d232021-11-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1355https://doaj.org/toc/2072-666XThe development of “portable, low cost and low consumption” gas microsensors is one of the strong needs for embedded portable devices in many fields such as public domain. In this paper, a new approach is presented on making, on the same chip, a network of head-to-tail facing PN junctions in order to miniaturize the sensor network and considerably reduce the required power for heating each cell independently. This paper is about recognizing a device that integrates both sensing and self-heating. This first study aims to evaluate the possibilities of this type of diode network for use as a gas sensor. The first part concerns the description of the technological process that is based on a doped polysilicon wafer in which a thin layer of metal oxide (a gallium-doped zinc oxide in our case) is deposited by RF sputtering. An electrical model will be proposed to explain the operation and advantage of this approach. We will show the two types of tests that have been carried out (static and dynamic) as well as the first encouraging results of these electrical characterizations under variable atmospheres.Vignesh GunasekaranSoffian YjjouEve HennequinThierry CampsNicolas MauranLionel PresmanesPhilippe MeniniMDPI AGarticleminiaturized gas sensor networkp-n junctionmetal oxideRF-sputteringZnO:Ga thin layerMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1355, p 1355 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	miniaturized gas sensor network p-n junction metal oxide RF-sputtering ZnO:Ga thin layer Mechanical engineering and machinery TJ1-1570
spellingShingle	miniaturized gas sensor network p-n junction metal oxide RF-sputtering ZnO:Ga thin layer Mechanical engineering and machinery TJ1-1570 Vignesh Gunasekaran Soffian Yjjou Eve Hennequin Thierry Camps Nicolas Mauran Lionel Presmanes Philippe Menini A New Miniaturized Gas Sensor Based on Zener Diode Network Covered by Metal Oxide
description	The development of “portable, low cost and low consumption” gas microsensors is one of the strong needs for embedded portable devices in many fields such as public domain. In this paper, a new approach is presented on making, on the same chip, a network of head-to-tail facing PN junctions in order to miniaturize the sensor network and considerably reduce the required power for heating each cell independently. This paper is about recognizing a device that integrates both sensing and self-heating. This first study aims to evaluate the possibilities of this type of diode network for use as a gas sensor. The first part concerns the description of the technological process that is based on a doped polysilicon wafer in which a thin layer of metal oxide (a gallium-doped zinc oxide in our case) is deposited by RF sputtering. An electrical model will be proposed to explain the operation and advantage of this approach. We will show the two types of tests that have been carried out (static and dynamic) as well as the first encouraging results of these electrical characterizations under variable atmospheres.
format	article
author	Vignesh Gunasekaran Soffian Yjjou Eve Hennequin Thierry Camps Nicolas Mauran Lionel Presmanes Philippe Menini
author_facet	Vignesh Gunasekaran Soffian Yjjou Eve Hennequin Thierry Camps Nicolas Mauran Lionel Presmanes Philippe Menini
author_sort	Vignesh Gunasekaran
title	A New Miniaturized Gas Sensor Based on Zener Diode Network Covered by Metal Oxide
title_short	A New Miniaturized Gas Sensor Based on Zener Diode Network Covered by Metal Oxide
title_full	A New Miniaturized Gas Sensor Based on Zener Diode Network Covered by Metal Oxide
title_fullStr	A New Miniaturized Gas Sensor Based on Zener Diode Network Covered by Metal Oxide
title_full_unstemmed	A New Miniaturized Gas Sensor Based on Zener Diode Network Covered by Metal Oxide
title_sort	new miniaturized gas sensor based on zener diode network covered by metal oxide
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/8afca9b6ab7c433196f72ce4ab668d23
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A New Miniaturized Gas Sensor Based on Zener Diode Network Covered by Metal Oxide

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