3D Model Registration-Based Batch Wafer-ID Recognition Algorithm

Wafer identification (ID) is a serial number printed on the surface of wafer, which is used for indexing production process data in manufacture execution system. The automatic recognition of wafer ID is helpful to improve the level of automatic production. However, the existing equipment and methods...

Descripción completa

Guardado en:

Detalles Bibliográficos
Autores principales:	Fang Cao, Zengguo Tian, Baozhu Jiang, Hongshuai Zhang, Heng Chen, Xuguang Zhu
Formato:	article
Lenguaje:	EN
Publicado:	IEEE 2021
Materias:	Optical character recognition wafer identification machine learning model registration Electrical engineering. Electronics. Nuclear engineering TK1-9971
Acceso en línea:	https://doaj.org/article/8b84b70eeb844b2bb4cc24040292fdc3
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

id	oai:doaj.org-article:8b84b70eeb844b2bb4cc24040292fdc3
record_format	dspace
spelling	oai:doaj.org-article:8b84b70eeb844b2bb4cc24040292fdc32021-11-18T00:06:47Z3D Model Registration-Based Batch Wafer-ID Recognition Algorithm2169-353610.1109/ACCESS.2021.3125735https://doaj.org/article/8b84b70eeb844b2bb4cc24040292fdc32021-01-01T00:00:00Zhttps://ieeexplore.ieee.org/document/9605616/https://doaj.org/toc/2169-3536Wafer identification (ID) is a serial number printed on the surface of wafer, which is used for indexing production process data in manufacture execution system. The automatic recognition of wafer ID is helpful to improve the level of automatic production. However, the existing equipment and methods mainly focus on single wafer-ID recognition, which require wafers to be taken out and placed on a specific platform, resulting in low efficiency. In this paper, we present a batch wafer-ID recognition method based on machine vision, including a specific designed image-acquisition system and recognition algorithms. Based on the priori information, we formulate a 3D model for the cassette and wafers to be registered with the features extracted from the image. Combined with image-processing techniques, the pose of wafers in the cassette is estimated to undistort the perspective deformation of wafer-ID characters, such that we can exploit a classic lightweight convolution neural network for character recognition. The proposed system can capture and recognize the whole image of a cassette of wafers at once, which does not need to take out the wafers from the cassette and avoids the risk of contamination. Extensive experiments were conducted to evaluate the performance of our proposed techniques by collecting the data set of wafer-ID images. The results show that our proposed 3D model-based rectification method can correct the character deformation effectively and enable the lightweight classifier to achieve high speed and high accuracy for batch wafer-ID recognition.Fang CaoZengguo TianBaozhu JiangHongshuai ZhangHeng ChenXuguang ZhuIEEEarticleOptical character recognitionwafer identificationmachine learningmodel registrationElectrical engineering. Electronics. Nuclear engineeringTK1-9971ENIEEE Access, Vol 9, Pp 150283-150291 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Optical character recognition wafer identification machine learning model registration Electrical engineering. Electronics. Nuclear engineering TK1-9971
spellingShingle	Optical character recognition wafer identification machine learning model registration Electrical engineering. Electronics. Nuclear engineering TK1-9971 Fang Cao Zengguo Tian Baozhu Jiang Hongshuai Zhang Heng Chen Xuguang Zhu 3D Model Registration-Based Batch Wafer-ID Recognition Algorithm
description	Wafer identification (ID) is a serial number printed on the surface of wafer, which is used for indexing production process data in manufacture execution system. The automatic recognition of wafer ID is helpful to improve the level of automatic production. However, the existing equipment and methods mainly focus on single wafer-ID recognition, which require wafers to be taken out and placed on a specific platform, resulting in low efficiency. In this paper, we present a batch wafer-ID recognition method based on machine vision, including a specific designed image-acquisition system and recognition algorithms. Based on the priori information, we formulate a 3D model for the cassette and wafers to be registered with the features extracted from the image. Combined with image-processing techniques, the pose of wafers in the cassette is estimated to undistort the perspective deformation of wafer-ID characters, such that we can exploit a classic lightweight convolution neural network for character recognition. The proposed system can capture and recognize the whole image of a cassette of wafers at once, which does not need to take out the wafers from the cassette and avoids the risk of contamination. Extensive experiments were conducted to evaluate the performance of our proposed techniques by collecting the data set of wafer-ID images. The results show that our proposed 3D model-based rectification method can correct the character deformation effectively and enable the lightweight classifier to achieve high speed and high accuracy for batch wafer-ID recognition.
format	article
author	Fang Cao Zengguo Tian Baozhu Jiang Hongshuai Zhang Heng Chen Xuguang Zhu
author_facet	Fang Cao Zengguo Tian Baozhu Jiang Hongshuai Zhang Heng Chen Xuguang Zhu
author_sort	Fang Cao
title	3D Model Registration-Based Batch Wafer-ID Recognition Algorithm
title_short	3D Model Registration-Based Batch Wafer-ID Recognition Algorithm
title_full	3D Model Registration-Based Batch Wafer-ID Recognition Algorithm
title_fullStr	3D Model Registration-Based Batch Wafer-ID Recognition Algorithm
title_full_unstemmed	3D Model Registration-Based Batch Wafer-ID Recognition Algorithm
title_sort	3d model registration-based batch wafer-id recognition algorithm
publisher	IEEE
publishDate	2021
url	https://doaj.org/article/8b84b70eeb844b2bb4cc24040292fdc3
work_keys_str_mv	AT fangcao 3dmodelregistrationbasedbatchwaferidrecognitionalgorithm AT zengguotian 3dmodelregistrationbasedbatchwaferidrecognitionalgorithm AT baozhujiang 3dmodelregistrationbasedbatchwaferidrecognitionalgorithm AT hongshuaizhang 3dmodelregistrationbasedbatchwaferidrecognitionalgorithm AT hengchen 3dmodelregistrationbasedbatchwaferidrecognitionalgorithm AT xuguangzhu 3dmodelregistrationbasedbatchwaferidrecognitionalgorithm
_version_	1718425236925317120

3D Model Registration-Based Batch Wafer-ID Recognition Algorithm

Ejemplares similares