3D Model Registration-Based Batch Wafer-ID Recognition Algorithm
Wafer identification (ID) is a serial number printed on the surface of wafer, which is used for indexing production process data in manufacture execution system. The automatic recognition of wafer ID is helpful to improve the level of automatic production. However, the existing equipment and methods...
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| Main Authors: | , , , , , |
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| Format: | article |
| Language: | EN |
| Published: |
IEEE
2021
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| Subjects: | |
| Online Access: | https://doaj.org/article/8b84b70eeb844b2bb4cc24040292fdc3 |
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