3D Model Registration-Based Batch Wafer-ID Recognition Algorithm
Wafer identification (ID) is a serial number printed on the surface of wafer, which is used for indexing production process data in manufacture execution system. The automatic recognition of wafer ID is helpful to improve the level of automatic production. However, the existing equipment and methods...
Enregistré dans:
| Auteurs principaux: | , , , , , |
|---|---|
| Format: | article |
| Langue: | EN |
| Publié: |
IEEE
2021
|
| Sujets: | |
| Accès en ligne: | https://doaj.org/article/8b84b70eeb844b2bb4cc24040292fdc3 |
| Tags: |
Ajouter un tag
Pas de tags, Soyez le premier à ajouter un tag!
|