A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities

In recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerom...

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Autores principales:	Junji Pu, Kai Zeng, Yulie Wu, Dingbang Xiao
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	optical force acceleration laser diode elliptical Gaussian beam MEMS particles cavity Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/8c9f40aa98a24015a4ac71fb9892c42a
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id	oai:doaj.org-article:8c9f40aa98a24015a4ac71fb9892c42a
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spelling	oai:doaj.org-article:8c9f40aa98a24015a4ac71fb9892c42a2021-11-25T18:23:30ZA Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities10.3390/mi121113752072-666Xhttps://doaj.org/article/8c9f40aa98a24015a4ac71fb9892c42a2021-11-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1375https://doaj.org/toc/2072-666XIn recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerometers reported are only suitable for the laboratory environment up to now. In this paper, a miniature optical force dual-axis accelerometer based on the miniature optical system and a particles cavity which is prepared by Micro-Electro-Mechanical Systems (MEMS) technology is proposed. The overall system of the miniature optical levitation including the miniature optical system and MEMS particles cavity is a cylindrical structure with a diameter of about 10 mm and a height of 33 mm (Φ 10 mm × 33 mm). Moreover, the size of this accelerometer is 200 mm × 100 mm × 100 mm. Due to the selected light source being a laser diode light source with elliptical distribution, it is sensitive to the external acceleration in both the long axis and the short axis. This accelerometer achieves a measurement range of ±0.17 g–±0.26 g and measurement resolution of 0.49 mg and 1.88 mg. The result shows that the short-term zero-bias stability of the two orthogonal axes of the optical force accelerometer is 4.4 mg and 9.2 mg, respectively. The main conclusion that can be drawn is that this optical force accelerometer could provide an effective solution for measuring acceleration with an optical force effect for compact engineering devices.Junji PuKai ZengYulie WuDingbang XiaoMDPI AGarticleoptical force accelerationlaser diodeelliptical Gaussian beamMEMS particles cavityMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1375, p 1375 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	optical force acceleration laser diode elliptical Gaussian beam MEMS particles cavity Mechanical engineering and machinery TJ1-1570
spellingShingle	optical force acceleration laser diode elliptical Gaussian beam MEMS particles cavity Mechanical engineering and machinery TJ1-1570 Junji Pu Kai Zeng Yulie Wu Dingbang Xiao A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities
description	In recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerometers reported are only suitable for the laboratory environment up to now. In this paper, a miniature optical force dual-axis accelerometer based on the miniature optical system and a particles cavity which is prepared by Micro-Electro-Mechanical Systems (MEMS) technology is proposed. The overall system of the miniature optical levitation including the miniature optical system and MEMS particles cavity is a cylindrical structure with a diameter of about 10 mm and a height of 33 mm (Φ 10 mm × 33 mm). Moreover, the size of this accelerometer is 200 mm × 100 mm × 100 mm. Due to the selected light source being a laser diode light source with elliptical distribution, it is sensitive to the external acceleration in both the long axis and the short axis. This accelerometer achieves a measurement range of ±0.17 g–±0.26 g and measurement resolution of 0.49 mg and 1.88 mg. The result shows that the short-term zero-bias stability of the two orthogonal axes of the optical force accelerometer is 4.4 mg and 9.2 mg, respectively. The main conclusion that can be drawn is that this optical force accelerometer could provide an effective solution for measuring acceleration with an optical force effect for compact engineering devices.
format	article
author	Junji Pu Kai Zeng Yulie Wu Dingbang Xiao
author_facet	Junji Pu Kai Zeng Yulie Wu Dingbang Xiao
author_sort	Junji Pu
title	A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities
title_short	A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities
title_full	A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities
title_fullStr	A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities
title_full_unstemmed	A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities
title_sort	miniature optical force dual-axis accelerometer based on laser diodes and small particles cavities
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/8c9f40aa98a24015a4ac71fb9892c42a
work_keys_str_mv	AT junjipu aminiatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities AT kaizeng aminiatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities AT yuliewu aminiatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities AT dingbangxiao aminiatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities AT junjipu miniatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities AT kaizeng miniatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities AT yuliewu miniatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities AT dingbangxiao miniatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities
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A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities

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