Wafer-scale integration of sacrificial nanofluidic chips for detecting and manipulating single DNA molecules
The wide use of microfluidics for biological analysis demands scalable preparation methods, yet in practice it is very challenging. Here, Wanget al. show a wafer-scale fabrication of nanofluidic chips with single-digit nanometre dimension, which is compatible with standard semiconductor processing.
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| Autores principales: | , , , , , , , , , , , , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Nature Portfolio
2017
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/8dfe6382a6f3435d9401956b405c4b22 |
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| Sumario: | The wide use of microfluidics for biological analysis demands scalable preparation methods, yet in practice it is very challenging. Here, Wanget al. show a wafer-scale fabrication of nanofluidic chips with single-digit nanometre dimension, which is compatible with standard semiconductor processing. |
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