Robust Control Design Based on Perturbation Cancellation for Micro-Positioning Design with Hysteresis

Based on the superiority of the piezoelectric elements, including lightweight, high electric mechanical transformation efficiency and a quick response time, a piezoelectric-based micro-positioning actuator is developed in this investigation. For eliminating the effects of hysteresis and modeling unc...

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Autores principales: Yung-Yue Chen, Yu-Jen Lan, Yi-Qing Zhang
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
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Acceso en línea:https://doaj.org/article/9017001fe14e4beba189bdc9f85e4760
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Sumario:Based on the superiority of the piezoelectric elements, including lightweight, high electric mechanical transformation efficiency and a quick response time, a piezoelectric-based micro-positioning actuator is developed in this investigation. For eliminating the effects of hysteresis and modeling uncertainties that appeared in this micro-positioning actuator, a nonlinear adaptive fuzzy robust control design with a perturbation cancellation ability is proposed for this micro-positioning design to achieve a positioning resolution of 1 μm. Structurally, this proposed robust control methodology contains two particular parts: a universal fuzzy approximator and a robust compensator, which are employed to cancel the modeling uncertainties caused by the perturbed parts of the micro-positioning actuator and mitigate the approximation error between the modeling uncertainties and the universal fuzzy approximator, respectively. From both the numerical simulations and real validations, this proposed micro-positioning design performs a promising positioning performance in the micrometer level.