Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode

Abstract Production of high-aspect-ratio silicon (Si) nanowire-based anode for lithium ion batteries is challenging particularly in terms of controlling wire property and geometry to improve the battery performance. This report demonstrates tunable optimization of inductively coupled plasma reactive...

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Autores principales:	Andam Deatama Refino, Nursidik Yulianto, Iqbal Syamsu, Andika Pandu Nugroho, Naufal Hanif Hawari, Alina Syring, Evvy Kartini, Ferry Iskandar, Tobias Voss, Afriyanti Sumboja, Erwin Peiner, Hutomo Suryo Wasisto
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/937063aeb71e41dc992f856e9bf040c8
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spelling	oai:doaj.org-article:937063aeb71e41dc992f856e9bf040c82021-12-02T18:37:11ZVersatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode10.1038/s41598-021-99173-42045-2322https://doaj.org/article/937063aeb71e41dc992f856e9bf040c82021-10-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-99173-4https://doaj.org/toc/2045-2322Abstract Production of high-aspect-ratio silicon (Si) nanowire-based anode for lithium ion batteries is challenging particularly in terms of controlling wire property and geometry to improve the battery performance. This report demonstrates tunable optimization of inductively coupled plasma reactive ion etching (ICP-RIE) at cryogenic temperature to fabricate vertically-aligned silicon nanowire array anodes with high verticality, controllable morphology, and good homogeneity. Three different materials [i.e., photoresist, chromium (Cr), and silicon dioxide (SiO2)] were employed as masks during the subsequent photolithography and cryogenic ICP-RIE processes to investigate their effects on the resulting nanowire structures. Silicon nanowire arrays with a high aspect ratio of up to 22 can be achieved by tuning several etching parameters [i.e., temperature, oxygen/sulfur hexafluoride (O2/SF6) gas mixture ratio, chamber pressure, plasma density, and ion energy]. Higher compressive stress was revealed for longer Si wires by means of Raman spectroscopy. Moreover, an anisotropy of lattice stress was found at the top and sidewall of Si nanowire, indicating compressive and tensile stresses, respectively. From electrochemical characterization, half-cell battery integrating ICP-RIE-based silicon nanowire anode exhibits a capacity of 0.25 mAh cm−2 with 16.67% capacity fading until 20 cycles, which has to be improved for application in future energy storage devices.Andam Deatama RefinoNursidik YuliantoIqbal SyamsuAndika Pandu NugrohoNaufal Hanif HawariAlina SyringEvvy KartiniFerry IskandarTobias VossAfriyanti SumbojaErwin PeinerHutomo Suryo WasistoNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-15 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Andam Deatama Refino Nursidik Yulianto Iqbal Syamsu Andika Pandu Nugroho Naufal Hanif Hawari Alina Syring Evvy Kartini Ferry Iskandar Tobias Voss Afriyanti Sumboja Erwin Peiner Hutomo Suryo Wasisto Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode
description	Abstract Production of high-aspect-ratio silicon (Si) nanowire-based anode for lithium ion batteries is challenging particularly in terms of controlling wire property and geometry to improve the battery performance. This report demonstrates tunable optimization of inductively coupled plasma reactive ion etching (ICP-RIE) at cryogenic temperature to fabricate vertically-aligned silicon nanowire array anodes with high verticality, controllable morphology, and good homogeneity. Three different materials [i.e., photoresist, chromium (Cr), and silicon dioxide (SiO2)] were employed as masks during the subsequent photolithography and cryogenic ICP-RIE processes to investigate their effects on the resulting nanowire structures. Silicon nanowire arrays with a high aspect ratio of up to 22 can be achieved by tuning several etching parameters [i.e., temperature, oxygen/sulfur hexafluoride (O2/SF6) gas mixture ratio, chamber pressure, plasma density, and ion energy]. Higher compressive stress was revealed for longer Si wires by means of Raman spectroscopy. Moreover, an anisotropy of lattice stress was found at the top and sidewall of Si nanowire, indicating compressive and tensile stresses, respectively. From electrochemical characterization, half-cell battery integrating ICP-RIE-based silicon nanowire anode exhibits a capacity of 0.25 mAh cm−2 with 16.67% capacity fading until 20 cycles, which has to be improved for application in future energy storage devices.
format	article
author	Andam Deatama Refino Nursidik Yulianto Iqbal Syamsu Andika Pandu Nugroho Naufal Hanif Hawari Alina Syring Evvy Kartini Ferry Iskandar Tobias Voss Afriyanti Sumboja Erwin Peiner Hutomo Suryo Wasisto
author_facet	Andam Deatama Refino Nursidik Yulianto Iqbal Syamsu Andika Pandu Nugroho Naufal Hanif Hawari Alina Syring Evvy Kartini Ferry Iskandar Tobias Voss Afriyanti Sumboja Erwin Peiner Hutomo Suryo Wasisto
author_sort	Andam Deatama Refino
title	Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode
title_short	Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode
title_full	Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode
title_fullStr	Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode
title_full_unstemmed	Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode
title_sort	versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/937063aeb71e41dc992f856e9bf040c8
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Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode

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