Fabrication of micro segment structured DLC film

DLC films have many excellent properties, such as high wear resistance and a low friction coefficient, and are used in an increasing range of application fields. However, their low transmission of visible light prevents DLC films from being used for transparent materials. Nano-segment structured DLC...

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Autores principales:	Yumi YOSHIDA, Yoshinao IWAMOTO, Makoto MATSUO, Hiroki AKASAKA, Naoto OHTAKE
Formato:	article
Lenguaje:	EN
Publicado:	The Japan Society of Mechanical Engineers 2015
Materias:	dlc film segment structure electron beam lithography micro texture optical properties mechanical properties Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/98f452f6f33647b4b1a2449ca43b3d28
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id	oai:doaj.org-article:98f452f6f33647b4b1a2449ca43b3d28
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spelling	oai:doaj.org-article:98f452f6f33647b4b1a2449ca43b3d282021-11-26T06:23:18ZFabrication of micro segment structured DLC film2187-974510.1299/mej.14-00437https://doaj.org/article/98f452f6f33647b4b1a2449ca43b3d282015-02-01T00:00:00Zhttps://www.jstage.jst.go.jp/article/mej/2/2/2_14-00437/_pdf/-char/enhttps://doaj.org/toc/2187-9745DLC films have many excellent properties, such as high wear resistance and a low friction coefficient, and are used in an increasing range of application fields. However, their low transmission of visible light prevents DLC films from being used for transparent materials. Nano-segment structured DLC (S-DLC) film with a segmented pitch equal to or less than the wavelength of visible light is supposed to not only solve this problem but also improve its mechanical properties. In this study as preliminary stage of nano S-DLC film, we fabricated DLC films consisting of 1-μm-size segments which have not only high wear resistance but also unique optical characteristics. This structure on DLC film was fabricated by electron beam lithography followed by liftoff method, which is suitable for nanoscale micromachining. The micro segment structured DLC films with groove width of 1 μm and pitch of 20 μm had rounded edges because the resist mask acted as an electrode. Micro S-DLC film exhibited structural colors because of the reflection-type diffraction grating and its transmittance was lower than that of continuous DLC films. From ball on disk test, it was found that the wear resistance of the micro S-DLC film with a groove of 1 μm was superior to that of a normal continuous DLC film and the small edge curvature could improve wear resistance furthermore.Yumi YOSHIDAYoshinao IWAMOTOMakoto MATSUOHiroki AKASAKANaoto OHTAKEThe Japan Society of Mechanical Engineersarticledlc filmsegment structureelectron beam lithographymicrotextureoptical propertiesmechanical propertiesMechanical engineering and machineryTJ1-1570ENMechanical Engineering Journal, Vol 2, Iss 2, Pp 14-00437-14-00437 (2015)
institution	DOAJ
collection	DOAJ
language	EN
topic	dlc film segment structure electron beam lithography micro texture optical properties mechanical properties Mechanical engineering and machinery TJ1-1570
spellingShingle	dlc film segment structure electron beam lithography micro texture optical properties mechanical properties Mechanical engineering and machinery TJ1-1570 Yumi YOSHIDA Yoshinao IWAMOTO Makoto MATSUO Hiroki AKASAKA Naoto OHTAKE Fabrication of micro segment structured DLC film
description	DLC films have many excellent properties, such as high wear resistance and a low friction coefficient, and are used in an increasing range of application fields. However, their low transmission of visible light prevents DLC films from being used for transparent materials. Nano-segment structured DLC (S-DLC) film with a segmented pitch equal to or less than the wavelength of visible light is supposed to not only solve this problem but also improve its mechanical properties. In this study as preliminary stage of nano S-DLC film, we fabricated DLC films consisting of 1-μm-size segments which have not only high wear resistance but also unique optical characteristics. This structure on DLC film was fabricated by electron beam lithography followed by liftoff method, which is suitable for nanoscale micromachining. The micro segment structured DLC films with groove width of 1 μm and pitch of 20 μm had rounded edges because the resist mask acted as an electrode. Micro S-DLC film exhibited structural colors because of the reflection-type diffraction grating and its transmittance was lower than that of continuous DLC films. From ball on disk test, it was found that the wear resistance of the micro S-DLC film with a groove of 1 μm was superior to that of a normal continuous DLC film and the small edge curvature could improve wear resistance furthermore.
format	article
author	Yumi YOSHIDA Yoshinao IWAMOTO Makoto MATSUO Hiroki AKASAKA Naoto OHTAKE
author_facet	Yumi YOSHIDA Yoshinao IWAMOTO Makoto MATSUO Hiroki AKASAKA Naoto OHTAKE
author_sort	Yumi YOSHIDA
title	Fabrication of micro segment structured DLC film
title_short	Fabrication of micro segment structured DLC film
title_full	Fabrication of micro segment structured DLC film
title_fullStr	Fabrication of micro segment structured DLC film
title_full_unstemmed	Fabrication of micro segment structured DLC film
title_sort	fabrication of micro segment structured dlc film
publisher	The Japan Society of Mechanical Engineers
publishDate	2015
url	https://doaj.org/article/98f452f6f33647b4b1a2449ca43b3d28
work_keys_str_mv	AT yumiyoshida fabricationofmicrosegmentstructureddlcfilm AT yoshinaoiwamoto fabricationofmicrosegmentstructureddlcfilm AT makotomatsuo fabricationofmicrosegmentstructureddlcfilm AT hirokiakasaka fabricationofmicrosegmentstructureddlcfilm AT naotoohtake fabricationofmicrosegmentstructureddlcfilm
_version_	1718409794868477952

Fabrication of micro segment structured DLC film

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