Fabrication of micro segment structured DLC film

Fabrication of micro segment structured DLC film

DLC films have many excellent properties, such as high wear resistance and a low friction coefficient, and are used in an increasing range of application fields. However, their low transmission of visible light prevents DLC films from being used for transparent materials. Nano-segment structured DLC...

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Bibliographic Details
Main Authors: Yumi YOSHIDA, Yoshinao IWAMOTO, Makoto MATSUO, Hiroki AKASAKA, Naoto OHTAKE
Format: article
Language:EN
Published: The Japan Society of Mechanical Engineers 2015
Subjects:
dlc film
segment structure
electron beam lithography
micro
texture
optical properties
mechanical properties
Mechanical engineering and machinery
TJ1-1570
Online Access:https://doaj.org/article/98f452f6f33647b4b1a2449ca43b3d28
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https://doaj.org/article/98f452f6f33647b4b1a2449ca43b3d28

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