Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam

Imaging buried interfaces is necessary to assess the quality of electronic devices and their degradation mechanisms. Here, Hirohata et al. use energy-filtered scanning electron microscopy to image buried defects in an inorganic lateral spin-valve device, at the nanometre scale and non-destructively.

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Autores principales:	Atsufumi Hirohata, Yasuaki Yamamoto, Benedict A. Murphy, Andrew J. Vick
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2016
Materias:	Science Q
Acceso en línea:	https://doaj.org/article/99e2496b2da94c25ba55a2e14f35ae6b
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spelling	oai:doaj.org-article:99e2496b2da94c25ba55a2e14f35ae6b2021-12-02T15:35:45ZNon-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam10.1038/ncomms127012041-1723https://doaj.org/article/99e2496b2da94c25ba55a2e14f35ae6b2016-09-01T00:00:00Zhttps://doi.org/10.1038/ncomms12701https://doaj.org/toc/2041-1723Imaging buried interfaces is necessary to assess the quality of electronic devices and their degradation mechanisms. Here, Hirohata et al. use energy-filtered scanning electron microscopy to image buried defects in an inorganic lateral spin-valve device, at the nanometre scale and non-destructively.Atsufumi HirohataYasuaki YamamotoBenedict A. MurphyAndrew J. VickNature PortfolioarticleScienceQENNature Communications, Vol 7, Iss 1, Pp 1-6 (2016)
institution	DOAJ
collection	DOAJ
language	EN
topic	Science Q
spellingShingle	Science Q Atsufumi Hirohata Yasuaki Yamamoto Benedict A. Murphy Andrew J. Vick Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam
description	Imaging buried interfaces is necessary to assess the quality of electronic devices and their degradation mechanisms. Here, Hirohata et al. use energy-filtered scanning electron microscopy to image buried defects in an inorganic lateral spin-valve device, at the nanometre scale and non-destructively.
format	article
author	Atsufumi Hirohata Yasuaki Yamamoto Benedict A. Murphy Andrew J. Vick
author_facet	Atsufumi Hirohata Yasuaki Yamamoto Benedict A. Murphy Andrew J. Vick
author_sort	Atsufumi Hirohata
title	Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam
title_short	Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam
title_full	Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam
title_fullStr	Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam
title_full_unstemmed	Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam
title_sort	non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam
publisher	Nature Portfolio
publishDate	2016
url	https://doaj.org/article/99e2496b2da94c25ba55a2e14f35ae6b
work_keys_str_mv	AT atsufumihirohata nondestructiveimagingofburiedelectronicinterfacesusingadeceleratedscanningelectronbeam AT yasuakiyamamoto nondestructiveimagingofburiedelectronicinterfacesusingadeceleratedscanningelectronbeam AT benedictamurphy nondestructiveimagingofburiedelectronicinterfacesusingadeceleratedscanningelectronbeam AT andrewjvick nondestructiveimagingofburiedelectronicinterfacesusingadeceleratedscanningelectronbeam
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Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam

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