Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam
Imaging buried interfaces is necessary to assess the quality of electronic devices and their degradation mechanisms. Here, Hirohata et al. use energy-filtered scanning electron microscopy to image buried defects in an inorganic lateral spin-valve device, at the nanometre scale and non-destructively.
Enregistré dans:
| Auteurs principaux: | , , , |
|---|---|
| Format: | article |
| Langue: | EN |
| Publié: |
Nature Portfolio
2016
|
| Sujets: | |
| Accès en ligne: | https://doaj.org/article/99e2496b2da94c25ba55a2e14f35ae6b |
| Tags: |
Ajouter un tag
Pas de tags, Soyez le premier à ajouter un tag!
|
Soyez le premier à ajouter un commentaire!