Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam
Imaging buried interfaces is necessary to assess the quality of electronic devices and their degradation mechanisms. Here, Hirohata et al. use energy-filtered scanning electron microscopy to image buried defects in an inorganic lateral spin-valve device, at the nanometre scale and non-destructively.
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| Main Authors: | , , , |
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| Format: | article |
| Language: | EN |
| Published: |
Nature Portfolio
2016
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| Subjects: | |
| Online Access: | https://doaj.org/article/99e2496b2da94c25ba55a2e14f35ae6b |
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