Development of computer-controlled atmospheric pressure plasma structuring for 2D/3D pattern on fused silica

Abstract Fused silica with structured and continuous patterns is increasingly demanded in advanced imaging and illumination fields because of its excellent properties and functional performance. Atmospheric pressure plasma, based on pure chemical etching under atmospheric pressure, is developed as a...

Descripción completa

Guardado en:

Detalles Bibliográficos
Autores principales:	Duo Li, Peng Ji, Yang Xu, Bo Wang, Zheng Qiao, Fei Ding
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/9afebe8c816e499f856cab1a33e03c39
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

id	oai:doaj.org-article:9afebe8c816e499f856cab1a33e03c39
record_format	dspace
spelling	oai:doaj.org-article:9afebe8c816e499f856cab1a33e03c392021-11-21T12:24:16ZDevelopment of computer-controlled atmospheric pressure plasma structuring for 2D/3D pattern on fused silica10.1038/s41598-021-01592-w2045-2322https://doaj.org/article/9afebe8c816e499f856cab1a33e03c392021-11-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-01592-whttps://doaj.org/toc/2045-2322Abstract Fused silica with structured and continuous patterns is increasingly demanded in advanced imaging and illumination fields because of its excellent properties and functional performance. Atmospheric pressure plasma, based on pure chemical etching under atmospheric pressure, is developed as a promising fabrication technique for fused silica due to its deterministic high material removal rate, controllable removal imprint and no mechanical load. The stable and controllable Gaussian-shape removal function makes computer-controlled plasma tool potential to generate complex structures with high accuracy, efficiency and flexibility. In the paper, computer-controlled atmospheric pressure plasma structuring (APPS) is proposed to fabricate 2D/3D patterns on fused silica optics. The capacitively coupled APPS system with a double-layer plasma torch and its discharge characteristics are firstly developed. By means of multi-physics simulation and process investigation, the stable and controllable Gaussian-shape removal function can be achieved. Two different structuring modes, including discrete and continuous APPS, are explored for 2D/3D patterns. A series of structuring experiments show that different kinds of 2D patterns (including square lens array, hexagon lens array and groove array) as well as complex 3D phase plate patterns have been successfully fabricated, which validates the effectiveness of the proposed APPS of 2D/3D patterns on fused silica optics.Duo LiPeng JiYang XuBo WangZheng QiaoFei DingNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-14 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Duo Li Peng Ji Yang Xu Bo Wang Zheng Qiao Fei Ding Development of computer-controlled atmospheric pressure plasma structuring for 2D/3D pattern on fused silica
description	Abstract Fused silica with structured and continuous patterns is increasingly demanded in advanced imaging and illumination fields because of its excellent properties and functional performance. Atmospheric pressure plasma, based on pure chemical etching under atmospheric pressure, is developed as a promising fabrication technique for fused silica due to its deterministic high material removal rate, controllable removal imprint and no mechanical load. The stable and controllable Gaussian-shape removal function makes computer-controlled plasma tool potential to generate complex structures with high accuracy, efficiency and flexibility. In the paper, computer-controlled atmospheric pressure plasma structuring (APPS) is proposed to fabricate 2D/3D patterns on fused silica optics. The capacitively coupled APPS system with a double-layer plasma torch and its discharge characteristics are firstly developed. By means of multi-physics simulation and process investigation, the stable and controllable Gaussian-shape removal function can be achieved. Two different structuring modes, including discrete and continuous APPS, are explored for 2D/3D patterns. A series of structuring experiments show that different kinds of 2D patterns (including square lens array, hexagon lens array and groove array) as well as complex 3D phase plate patterns have been successfully fabricated, which validates the effectiveness of the proposed APPS of 2D/3D patterns on fused silica optics.
format	article
author	Duo Li Peng Ji Yang Xu Bo Wang Zheng Qiao Fei Ding
author_facet	Duo Li Peng Ji Yang Xu Bo Wang Zheng Qiao Fei Ding
author_sort	Duo Li
title	Development of computer-controlled atmospheric pressure plasma structuring for 2D/3D pattern on fused silica
title_short	Development of computer-controlled atmospheric pressure plasma structuring for 2D/3D pattern on fused silica
title_full	Development of computer-controlled atmospheric pressure plasma structuring for 2D/3D pattern on fused silica
title_fullStr	Development of computer-controlled atmospheric pressure plasma structuring for 2D/3D pattern on fused silica
title_full_unstemmed	Development of computer-controlled atmospheric pressure plasma structuring for 2D/3D pattern on fused silica
title_sort	development of computer-controlled atmospheric pressure plasma structuring for 2d/3d pattern on fused silica
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/9afebe8c816e499f856cab1a33e03c39
work_keys_str_mv	AT duoli developmentofcomputercontrolledatmosphericpressureplasmastructuringfor2d3dpatternonfusedsilica AT pengji developmentofcomputercontrolledatmosphericpressureplasmastructuringfor2d3dpatternonfusedsilica AT yangxu developmentofcomputercontrolledatmosphericpressureplasmastructuringfor2d3dpatternonfusedsilica AT bowang developmentofcomputercontrolledatmosphericpressureplasmastructuringfor2d3dpatternonfusedsilica AT zhengqiao developmentofcomputercontrolledatmosphericpressureplasmastructuringfor2d3dpatternonfusedsilica AT feiding developmentofcomputercontrolledatmosphericpressureplasmastructuringfor2d3dpatternonfusedsilica
_version_	1718419020259000320

Development of computer-controlled atmospheric pressure plasma structuring for 2D/3D pattern on fused silica

Ejemplares similares