Preparation and characteristic analysis of nanofacula array

Abstract The development of nanofacula array is an effective methods to improve the performance of Near-field Scanning Optical Microscopy (NSOM) and achieve high-throughput array scanning. The nanofacula array is realized by preparing metal nanopore array through the "two etching-one developmen...

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Autores principales:	Lina Shao, Xin Tian, Shengxiang Ji, Hongda Wang, Yan Shi
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/9b71bb36a5ca404d9cda52b1a1c930a8
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spelling	oai:doaj.org-article:9b71bb36a5ca404d9cda52b1a1c930a82021-11-14T12:22:57ZPreparation and characteristic analysis of nanofacula array10.1038/s41598-021-01637-02045-2322https://doaj.org/article/9b71bb36a5ca404d9cda52b1a1c930a82021-11-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-01637-0https://doaj.org/toc/2045-2322Abstract The development of nanofacula array is an effective methods to improve the performance of Near-field Scanning Optical Microscopy (NSOM) and achieve high-throughput array scanning. The nanofacula array is realized by preparing metal nanopore array through the "two etching-one development" method of double-layer resists and the negative lift-off process after metal film coating. The shading property of metal film plays important rules in nanofacula array fabrication. We investigate the shading coefficient of three kinds of metal films (gold–palladium alloy (Au/Pd), platinum (Pt), chromium (Cr)) under different coating times, and 3.5 min Au/Pd film is determined as the candidate of the nanofacula array fabrication for its lower thickness (about 23 nm) and higher shading coefficient (≥ 90%). The nanofacula array is obtained by irradiating with white light (central wavelength of 500 nm) through the metal nanopore array (250/450 nm pore diameter, 2 μm pore spacing and 7 μm group spacing). Moreover, the finite difference and time domain (FDTD) simulation proves that the combination of nanopore array and microlens array achieves high-energy focused nanofacula array, which shows a 3.2 times enhancement of electric field. It provides a new idea for NSOM to realize fast super-resolution focusing facula array.Lina ShaoXin TianShengxiang JiHongda WangYan ShiNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-7 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Lina Shao Xin Tian Shengxiang Ji Hongda Wang Yan Shi Preparation and characteristic analysis of nanofacula array
description	Abstract The development of nanofacula array is an effective methods to improve the performance of Near-field Scanning Optical Microscopy (NSOM) and achieve high-throughput array scanning. The nanofacula array is realized by preparing metal nanopore array through the "two etching-one development" method of double-layer resists and the negative lift-off process after metal film coating. The shading property of metal film plays important rules in nanofacula array fabrication. We investigate the shading coefficient of three kinds of metal films (gold–palladium alloy (Au/Pd), platinum (Pt), chromium (Cr)) under different coating times, and 3.5 min Au/Pd film is determined as the candidate of the nanofacula array fabrication for its lower thickness (about 23 nm) and higher shading coefficient (≥ 90%). The nanofacula array is obtained by irradiating with white light (central wavelength of 500 nm) through the metal nanopore array (250/450 nm pore diameter, 2 μm pore spacing and 7 μm group spacing). Moreover, the finite difference and time domain (FDTD) simulation proves that the combination of nanopore array and microlens array achieves high-energy focused nanofacula array, which shows a 3.2 times enhancement of electric field. It provides a new idea for NSOM to realize fast super-resolution focusing facula array.
format	article
author	Lina Shao Xin Tian Shengxiang Ji Hongda Wang Yan Shi
author_facet	Lina Shao Xin Tian Shengxiang Ji Hongda Wang Yan Shi
author_sort	Lina Shao
title	Preparation and characteristic analysis of nanofacula array
title_short	Preparation and characteristic analysis of nanofacula array
title_full	Preparation and characteristic analysis of nanofacula array
title_fullStr	Preparation and characteristic analysis of nanofacula array
title_full_unstemmed	Preparation and characteristic analysis of nanofacula array
title_sort	preparation and characteristic analysis of nanofacula array
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/9b71bb36a5ca404d9cda52b1a1c930a8
work_keys_str_mv	AT linashao preparationandcharacteristicanalysisofnanofaculaarray AT xintian preparationandcharacteristicanalysisofnanofaculaarray AT shengxiangji preparationandcharacteristicanalysisofnanofaculaarray AT hongdawang preparationandcharacteristicanalysisofnanofaculaarray AT yanshi preparationandcharacteristicanalysisofnanofaculaarray
_version_	1718429245461495808

Preparation and characteristic analysis of nanofacula array

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