Shift-rotation absolute measurement method for irregular aperture optical surfaces based on deep learning

Absolute measurement technology has received considerable attention in the field of optical metrology owing to its high accuracy. However, to ensure accuracy of measurement, the traditional method requires the use of expensive high-precision stages and considerable time for the precise adjustment of...

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Autores principales: Lili Yang, Jiantai Dou, Zhongming Yang, Zhaojun Liu
Formato: article
Lenguaje:EN
Publicado: Elsevier 2021
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Acceso en línea:https://doaj.org/article/9d55cef5de2f454db6dc9bae7a284189
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