275 nm Deep Ultraviolet AlGaN-Based Micro-LED Arrays for Ultraviolet Communication
In this work, we fabricated and characterized 4 × 4 parallel flip-chip AlGaN-based micro-LED arrays with varied mesa diameters of 120 µm, 100 µm, 80 µm, and 60 µm. The reported mi...
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| Auteurs principaux: | , , , , , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
IEEE
2022
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| Sujets: | |
| Accès en ligne: | https://doaj.org/article/9d5736dbb7584d0b81f555f01d26c28a |
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| Résumé: | In this work, we fabricated and characterized 4 × 4 parallel flip-chip AlGaN-based micro-LED arrays with varied mesa diameters of 120 µm, 100 µm, 80 µm, and 60 µm. The reported micro-LED arrays have a maximum bandwidth of 380 MHz and a peak wavelength of ∼275 nm. It is found that the electrical and optical characteristics of AlGaN-based micro-LED arrays show strong size dependence for ultraviolet communication (UVC). The differential resistance increases from 28.8 Ω to 112 Ω, the external quantum efficiency (EQE) is increased by ∼30%, and the bandwidth doubles as the diameter of individual micro-LED decreases from 120 µm to 60 µm. Our research proves that tailoring the mesa size of parallel flip-chip AlGaN-based micro-LED arrays can further enhance its bandwidth and promote its application in UVC. |
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