275 nm Deep Ultraviolet AlGaN-Based Micro-LED Arrays for Ultraviolet Communication

In this work, we fabricated and characterized 4 × 4 parallel flip-chip AlGaN-based micro-LED arrays with varied mesa diameters of 120 µm, 100 µm, 80 µm, and 60 µm. The reported mi...

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Autores principales: Liang Guo, Yanan Guo, Jiankun Yang, Jianchang Yan, Jianguo Liu, Junxi Wang, Tongbo Wei
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Lenguaje:EN
Publicado: IEEE 2022
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Acceso en línea:https://doaj.org/article/9d5736dbb7584d0b81f555f01d26c28a
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spelling oai:doaj.org-article:9d5736dbb7584d0b81f555f01d26c28a2021-12-04T00:00:05Z275 nm Deep Ultraviolet AlGaN-Based Micro-LED Arrays for Ultraviolet Communication1943-065510.1109/JPHOT.2021.3129648https://doaj.org/article/9d5736dbb7584d0b81f555f01d26c28a2022-01-01T00:00:00Zhttps://ieeexplore.ieee.org/document/9623490/https://doaj.org/toc/1943-0655In this work, we fabricated and characterized 4 × 4 parallel flip-chip AlGaN-based micro-LED arrays with varied mesa diameters of 120 µm, 100 µm, 80 µm, and 60 µm. The reported micro-LED arrays have a maximum bandwidth of 380 MHz and a peak wavelength of ∼275 nm. It is found that the electrical and optical characteristics of AlGaN-based micro-LED arrays show strong size dependence for ultraviolet communication (UVC). The differential resistance increases from 28.8 Ω to 112 Ω, the external quantum efficiency (EQE) is increased by ∼30%, and the bandwidth doubles as the diameter of individual micro-LED decreases from 120 µm to 60 µm. Our research proves that tailoring the mesa size of parallel flip-chip AlGaN-based micro-LED arrays can further enhance its bandwidth and promote its application in UVC.Liang GuoYanan GuoJiankun YangJianchang YanJianguo LiuJunxi WangTongbo WeiIEEEarticleMicro-LED arraysultraviolet communicationmodulation bandwidthsize dependenceApplied optics. PhotonicsTA1501-1820Optics. LightQC350-467ENIEEE Photonics Journal, Vol 14, Iss 1, Pp 1-5 (2022)
institution DOAJ
collection DOAJ
language EN
topic Micro-LED arrays
ultraviolet communication
modulation bandwidth
size dependence
Applied optics. Photonics
TA1501-1820
Optics. Light
QC350-467
spellingShingle Micro-LED arrays
ultraviolet communication
modulation bandwidth
size dependence
Applied optics. Photonics
TA1501-1820
Optics. Light
QC350-467
Liang Guo
Yanan Guo
Jiankun Yang
Jianchang Yan
Jianguo Liu
Junxi Wang
Tongbo Wei
275 nm Deep Ultraviolet AlGaN-Based Micro-LED Arrays for Ultraviolet Communication
description In this work, we fabricated and characterized 4 × 4 parallel flip-chip AlGaN-based micro-LED arrays with varied mesa diameters of 120 µm, 100 µm, 80 µm, and 60 µm. The reported micro-LED arrays have a maximum bandwidth of 380 MHz and a peak wavelength of ∼275 nm. It is found that the electrical and optical characteristics of AlGaN-based micro-LED arrays show strong size dependence for ultraviolet communication (UVC). The differential resistance increases from 28.8 Ω to 112 Ω, the external quantum efficiency (EQE) is increased by ∼30%, and the bandwidth doubles as the diameter of individual micro-LED decreases from 120 µm to 60 µm. Our research proves that tailoring the mesa size of parallel flip-chip AlGaN-based micro-LED arrays can further enhance its bandwidth and promote its application in UVC.
format article
author Liang Guo
Yanan Guo
Jiankun Yang
Jianchang Yan
Jianguo Liu
Junxi Wang
Tongbo Wei
author_facet Liang Guo
Yanan Guo
Jiankun Yang
Jianchang Yan
Jianguo Liu
Junxi Wang
Tongbo Wei
author_sort Liang Guo
title 275 nm Deep Ultraviolet AlGaN-Based Micro-LED Arrays for Ultraviolet Communication
title_short 275 nm Deep Ultraviolet AlGaN-Based Micro-LED Arrays for Ultraviolet Communication
title_full 275 nm Deep Ultraviolet AlGaN-Based Micro-LED Arrays for Ultraviolet Communication
title_fullStr 275 nm Deep Ultraviolet AlGaN-Based Micro-LED Arrays for Ultraviolet Communication
title_full_unstemmed 275 nm Deep Ultraviolet AlGaN-Based Micro-LED Arrays for Ultraviolet Communication
title_sort 275 nm deep ultraviolet algan-based micro-led arrays for ultraviolet communication
publisher IEEE
publishDate 2022
url https://doaj.org/article/9d5736dbb7584d0b81f555f01d26c28a
work_keys_str_mv AT liangguo 275nmdeepultravioletalganbasedmicroledarraysforultravioletcommunication
AT yananguo 275nmdeepultravioletalganbasedmicroledarraysforultravioletcommunication
AT jiankunyang 275nmdeepultravioletalganbasedmicroledarraysforultravioletcommunication
AT jianchangyan 275nmdeepultravioletalganbasedmicroledarraysforultravioletcommunication
AT jianguoliu 275nmdeepultravioletalganbasedmicroledarraysforultravioletcommunication
AT junxiwang 275nmdeepultravioletalganbasedmicroledarraysforultravioletcommunication
AT tongbowei 275nmdeepultravioletalganbasedmicroledarraysforultravioletcommunication
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