Effects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga<sub>2</sub>O<sub>3</sub> Thin Films Fabricated by Sol–Gel Method
In this study, β-Ga<sub>2</sub>O<sub>3</sub> films were fabricated on a quartz substrate by the sol–gel method using different drying temperatures and solutions of different molar concentrations, and their structural, optical, and electrical properties were evaluated. The as-...
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| Autores principales: | , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
MDPI AG
2021
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/a142edcefcd04a599f9b317e01dbccec |
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| Sumario: | In this study, β-Ga<sub>2</sub>O<sub>3</sub> films were fabricated on a quartz substrate by the sol–gel method using different drying temperatures and solutions of different molar concentrations, and their structural, optical, and electrical properties were evaluated. The as-fabricated films exhibited a monoclinic β-Ga<sub>2</sub>O<sub>3</sub> crystal structure, whose crystallinity and crystallite size increased with increasing molar concentration of the solutions used and increasing drying temperature. Scanning electron microscopy of the as-prepared samples revealed dense surface morphologies and that the thickness of the films also depended on the deposition conditions. The average transmittance of all the samples was above 8% in visible light, and the calculated optical bandgap energy was 4.9 eV. The resistivity measured using a 4-point probe system was 3.7 × 10<sup>3</sup> Ω cm. |
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