Effects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga2O3 Thin Films Fabricated by Sol–Gel Method

In this study, β-Ga2O3 films were fabricated on a quartz substrate by the sol–gel method using different drying temperatures and solutions of different molar concentrations, and their structural, optical, and electrical properties were evaluated. The as-...

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Autores principales:	Taejun Park, Kyunghwan Kim, Jeongsoo Hong
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	β-Ga<sub>2</sub>O<sub>3</sub> sol–gel film solution process semiconductor Engineering (General). Civil engineering (General) TA1-2040
Acceso en línea:	https://doaj.org/article/a142edcefcd04a599f9b317e01dbccec
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id	oai:doaj.org-article:a142edcefcd04a599f9b317e01dbccec
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spelling	oai:doaj.org-article:a142edcefcd04a599f9b317e01dbccec2021-11-25T17:16:46ZEffects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga<sub>2</sub>O<sub>3</sub> Thin Films Fabricated by Sol–Gel Method10.3390/coatings111113912079-6412https://doaj.org/article/a142edcefcd04a599f9b317e01dbccec2021-11-01T00:00:00Zhttps://www.mdpi.com/2079-6412/11/11/1391https://doaj.org/toc/2079-6412In this study, β-Ga<sub>2</sub>O<sub>3</sub> films were fabricated on a quartz substrate by the sol–gel method using different drying temperatures and solutions of different molar concentrations, and their structural, optical, and electrical properties were evaluated. The as-fabricated films exhibited a monoclinic β-Ga<sub>2</sub>O<sub>3</sub> crystal structure, whose crystallinity and crystallite size increased with increasing molar concentration of the solutions used and increasing drying temperature. Scanning electron microscopy of the as-prepared samples revealed dense surface morphologies and that the thickness of the films also depended on the deposition conditions. The average transmittance of all the samples was above 8% in visible light, and the calculated optical bandgap energy was 4.9 eV. The resistivity measured using a 4-point probe system was 3.7 × 10<sup>3</sup> Ω cm.Taejun ParkKyunghwan KimJeongsoo HongMDPI AGarticleβ-Ga<sub>2</sub>O<sub>3</sub>sol–gelfilmsolution processsemiconductorEngineering (General). Civil engineering (General)TA1-2040ENCoatings, Vol 11, Iss 1391, p 1391 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	β-Ga<sub>2</sub>O<sub>3</sub> sol–gel film solution process semiconductor Engineering (General). Civil engineering (General) TA1-2040
spellingShingle	β-Ga<sub>2</sub>O<sub>3</sub> sol–gel film solution process semiconductor Engineering (General). Civil engineering (General) TA1-2040 Taejun Park Kyunghwan Kim Jeongsoo Hong Effects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga<sub>2</sub>O<sub>3</sub> Thin Films Fabricated by Sol–Gel Method
description	In this study, β-Ga<sub>2</sub>O<sub>3</sub> films were fabricated on a quartz substrate by the sol–gel method using different drying temperatures and solutions of different molar concentrations, and their structural, optical, and electrical properties were evaluated. The as-fabricated films exhibited a monoclinic β-Ga<sub>2</sub>O<sub>3</sub> crystal structure, whose crystallinity and crystallite size increased with increasing molar concentration of the solutions used and increasing drying temperature. Scanning electron microscopy of the as-prepared samples revealed dense surface morphologies and that the thickness of the films also depended on the deposition conditions. The average transmittance of all the samples was above 8% in visible light, and the calculated optical bandgap energy was 4.9 eV. The resistivity measured using a 4-point probe system was 3.7 × 10<sup>3</sup> Ω cm.
format	article
author	Taejun Park Kyunghwan Kim Jeongsoo Hong
author_facet	Taejun Park Kyunghwan Kim Jeongsoo Hong
author_sort	Taejun Park
title	Effects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga<sub>2</sub>O<sub>3</sub> Thin Films Fabricated by Sol–Gel Method
title_short	Effects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga<sub>2</sub>O<sub>3</sub> Thin Films Fabricated by Sol–Gel Method
title_full	Effects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga<sub>2</sub>O<sub>3</sub> Thin Films Fabricated by Sol–Gel Method
title_fullStr	Effects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga<sub>2</sub>O<sub>3</sub> Thin Films Fabricated by Sol–Gel Method
title_full_unstemmed	Effects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga<sub>2</sub>O<sub>3</sub> Thin Films Fabricated by Sol–Gel Method
title_sort	effects of drying temperature and molar concentration on structural, optical, and electrical properties of β-ga<sub>2</sub>o<sub>3</sub> thin films fabricated by sol–gel method
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/a142edcefcd04a599f9b317e01dbccec
work_keys_str_mv	AT taejunpark effectsofdryingtemperatureandmolarconcentrationonstructuralopticalandelectricalpropertiesofbgasub2subosub3subthinfilmsfabricatedbysolgelmethod AT kyunghwankim effectsofdryingtemperatureandmolarconcentrationonstructuralopticalandelectricalpropertiesofbgasub2subosub3subthinfilmsfabricatedbysolgelmethod AT jeongsoohong effectsofdryingtemperatureandmolarconcentrationonstructuralopticalandelectricalpropertiesofbgasub2subosub3subthinfilmsfabricatedbysolgelmethod
_version_	1718412549428346880

Effects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga<sub>2</sub>O<sub>3</sub> Thin Films Fabricated by Sol–Gel Method

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