Effects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga<sub>2</sub>O<sub>3</sub> Thin Films Fabricated by Sol–Gel Method

Effects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga<sub>2</sub>O<sub>3</sub> Thin Films Fabricated by Sol–Gel Method

In this study, β-Ga<sub>2</sub>O<sub>3</sub> films were fabricated on a quartz substrate by the sol–gel method using different drying temperatures and solutions of different molar concentrations, and their structural, optical, and electrical properties were evaluated. The as-...

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Autores principales: Taejun Park, Kyunghwan Kim, Jeongsoo Hong
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
Materias:
β-Ga<sub>2</sub>O<sub>3</sub>
sol–gel
film
solution process
semiconductor
Engineering (General). Civil engineering (General)
TA1-2040
Acceso en línea:https://doaj.org/article/a142edcefcd04a599f9b317e01dbccec
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