RIFTA: A Robust Iterative Fourier Transform-based dwell time Algorithm for ultra-precision ion beam figuring of synchrotron mirrors

Abstract With the rapid evolution of synchrotron X-ray sources, the demand for high-precision X-ray mirrors has greatly increased. Single nanometer profile error is required to keep imaging capability at the diffraction limit. Ion Beam Figuring (IBF), as a highly deterministic surfacing technique, h...

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Bibliographic Details
Main Authors: Tianyi Wang, Lei Huang, Hyukmo Kang, Heejoo Choi, Dae Wook Kim, Kashmira Tayabaly, Mourad Idir
Format: article
Language:EN
Published: Nature Portfolio 2020
Subjects:
R
Q
Online Access:https://doaj.org/article/a1b82a51f04d41bf9ba9e67a4663ca66
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