Combinatorial search of Fe-Ni-Cr system magnetostrictive alloys for force sensors

Magnetostrictive materials of the Fe-Ni-Cr ternary system for sensitivity enhancement of force sensors were searched by using a combinatorial method. Magnetostrictive materials for force sensors require large magnetostriction, high relative permeability, and high resistivity. This research is an att...

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Autores principales:	Takuya MAETANI, Yutaka NAKAMITSU, Junpei SAKURAI, Shigeki NAKAGAWA, Seiichi HATA
Formato:	article
Lenguaje:	EN
Publicado:	The Japan Society of Mechanical Engineers 2015
Materias:	combinatorial method magnetostriction sensor magnetostrictive material permeability resistivity combinatorial sputtering Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/a2016b4d332c4519ba23d40990f34e06
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spelling	oai:doaj.org-article:a2016b4d332c4519ba23d40990f34e062021-11-26T06:16:58ZCombinatorial search of Fe-Ni-Cr system magnetostrictive alloys for force sensors2187-974510.1299/mej.14-00462https://doaj.org/article/a2016b4d332c4519ba23d40990f34e062015-02-01T00:00:00Zhttps://www.jstage.jst.go.jp/article/mej/2/1/2_14-00462/_pdf/-char/enhttps://doaj.org/toc/2187-9745Magnetostrictive materials of the Fe-Ni-Cr ternary system for sensitivity enhancement of force sensors were searched by using a combinatorial method. Magnetostrictive materials for force sensors require large magnetostriction, high relative permeability, and high resistivity. This research is an attempt to find composition ranges that satisfy the following requirements: magnetostriction greater than 20×10 -6, relative permeability greater than 4,000, and resistivity over 90 μΩ cm. A novel combinatorial deposition method, known as Combinatorial New Facing Targets Sputtering (Combi-NFTS) method was applied to fabricate libraries of samples with various compositions. Samples for measurement of the relative permeability and resistivity were synthesized with a composition distribution by using Combi-NFTS onto a 108 mm×76 mm glass substrate. After deposition of thin film, each sample is divided into 10 mm×10 mm. The relative permeability and resistivity were measured by using a vibrating sample magnetometer and the four probe method, respectively. Bilayer cantilever samples for evaluation of magnetostriction were fabricated onto a 6 mm×20 mm×0.1 mm Si substrate, whereby deflection of the samples changes when a magnetic field is applied. The laser lever method was used to measure the cantilever deflection. The results indicate that the composition range with an Fe content of 26-36.5 at.%, a Ni content of 61-66 at.%, and a Cr content of 7.5-9.5 at.% satisfy the requirement criteria.Takuya MAETANIYutaka NAKAMITSUJunpei SAKURAIShigeki NAKAGAWASeiichi HATAThe Japan Society of Mechanical Engineersarticlecombinatorial methodmagnetostrictionsensormagnetostrictive materialpermeabilityresistivitycombinatorial sputteringMechanical engineering and machineryTJ1-1570ENMechanical Engineering Journal, Vol 2, Iss 1, Pp 14-00462-14-00462 (2015)
institution	DOAJ
collection	DOAJ
language	EN
topic	combinatorial method magnetostriction sensor magnetostrictive material permeability resistivity combinatorial sputtering Mechanical engineering and machinery TJ1-1570
spellingShingle	combinatorial method magnetostriction sensor magnetostrictive material permeability resistivity combinatorial sputtering Mechanical engineering and machinery TJ1-1570 Takuya MAETANI Yutaka NAKAMITSU Junpei SAKURAI Shigeki NAKAGAWA Seiichi HATA Combinatorial search of Fe-Ni-Cr system magnetostrictive alloys for force sensors
description	Magnetostrictive materials of the Fe-Ni-Cr ternary system for sensitivity enhancement of force sensors were searched by using a combinatorial method. Magnetostrictive materials for force sensors require large magnetostriction, high relative permeability, and high resistivity. This research is an attempt to find composition ranges that satisfy the following requirements: magnetostriction greater than 20×10 -6, relative permeability greater than 4,000, and resistivity over 90 μΩ cm. A novel combinatorial deposition method, known as Combinatorial New Facing Targets Sputtering (Combi-NFTS) method was applied to fabricate libraries of samples with various compositions. Samples for measurement of the relative permeability and resistivity were synthesized with a composition distribution by using Combi-NFTS onto a 108 mm×76 mm glass substrate. After deposition of thin film, each sample is divided into 10 mm×10 mm. The relative permeability and resistivity were measured by using a vibrating sample magnetometer and the four probe method, respectively. Bilayer cantilever samples for evaluation of magnetostriction were fabricated onto a 6 mm×20 mm×0.1 mm Si substrate, whereby deflection of the samples changes when a magnetic field is applied. The laser lever method was used to measure the cantilever deflection. The results indicate that the composition range with an Fe content of 26-36.5 at.%, a Ni content of 61-66 at.%, and a Cr content of 7.5-9.5 at.% satisfy the requirement criteria.
format	article
author	Takuya MAETANI Yutaka NAKAMITSU Junpei SAKURAI Shigeki NAKAGAWA Seiichi HATA
author_facet	Takuya MAETANI Yutaka NAKAMITSU Junpei SAKURAI Shigeki NAKAGAWA Seiichi HATA
author_sort	Takuya MAETANI
title	Combinatorial search of Fe-Ni-Cr system magnetostrictive alloys for force sensors
title_short	Combinatorial search of Fe-Ni-Cr system magnetostrictive alloys for force sensors
title_full	Combinatorial search of Fe-Ni-Cr system magnetostrictive alloys for force sensors
title_fullStr	Combinatorial search of Fe-Ni-Cr system magnetostrictive alloys for force sensors
title_full_unstemmed	Combinatorial search of Fe-Ni-Cr system magnetostrictive alloys for force sensors
title_sort	combinatorial search of fe-ni-cr system magnetostrictive alloys for force sensors
publisher	The Japan Society of Mechanical Engineers
publishDate	2015
url	https://doaj.org/article/a2016b4d332c4519ba23d40990f34e06
work_keys_str_mv	AT takuyamaetani combinatorialsearchoffenicrsystemmagnetostrictivealloysforforcesensors AT yutakanakamitsu combinatorialsearchoffenicrsystemmagnetostrictivealloysforforcesensors AT junpeisakurai combinatorialsearchoffenicrsystemmagnetostrictivealloysforforcesensors AT shigekinakagawa combinatorialsearchoffenicrsystemmagnetostrictivealloysforforcesensors AT seiichihata combinatorialsearchoffenicrsystemmagnetostrictivealloysforforcesensors
_version_	1718409797886279680

Combinatorial search of Fe-Ni-Cr system magnetostrictive alloys for force sensors

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