Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes

Abstract Shear mode solidly mounted resonators (SMRs) are fabricated using an inclined c-axis ZnO grown on a rough Al electrode. The roughness of the Al surface is controlled by changing the substrate temperature during the deposition process to promote the growth of inclined ZnO microcrystals. The...

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Autores principales:	Girish Rughoobur, Mario DeMiguel-Ramos, José-Miguel Escolano, Enrique Iborra, Andrew John Flewitt
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/a531ab8843aa4568b39d4ec22873f8b7
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spelling	oai:doaj.org-article:a531ab8843aa4568b39d4ec22873f8b72021-12-02T12:30:53ZGravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes10.1038/s41598-017-01545-22045-2322https://doaj.org/article/a531ab8843aa4568b39d4ec22873f8b72017-05-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-01545-2https://doaj.org/toc/2045-2322Abstract Shear mode solidly mounted resonators (SMRs) are fabricated using an inclined c-axis ZnO grown on a rough Al electrode. The roughness of the Al surface is controlled by changing the substrate temperature during the deposition process to promote the growth of inclined ZnO microcrystals. The optimum substrate temperature to obtain homogeneously inclined c-axis grains in ZnO films is achieved by depositing Al at 100 °C with a surface roughness ~9.2 nm, which caused an inclination angle of ~25° of the ZnO c-axis with respect to the surface normal. Shear mode devices with quality-factors at resonance, Q r and effective electromechanical coupling factors, $${{\boldsymbol{k}}}_{{\bf{eff}}}^{{\bf{2}}}$$ k eff 2 , as high as 180 and 3.4% are respectively measured. Mass sensitivities, S m of (4.9 ± 0.1) kHz · cm2/ng and temperature coefficient of frequency (TCF) of ~−67 ppm/K are obtained using this shear mode. The performance of the devices as viscosity sensors and biosensors is demonstrated by determining the frequency shifts of water-ethanol mixtures and detection of Rabbit immunoglobin G (IgG) whole molecule (H&L) respectively.Girish RughooburMario DeMiguel-RamosJosé-Miguel EscolanoEnrique IborraAndrew John FlewittNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-9 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Girish Rughoobur Mario DeMiguel-Ramos José-Miguel Escolano Enrique Iborra Andrew John Flewitt Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes
description	Abstract Shear mode solidly mounted resonators (SMRs) are fabricated using an inclined c-axis ZnO grown on a rough Al electrode. The roughness of the Al surface is controlled by changing the substrate temperature during the deposition process to promote the growth of inclined ZnO microcrystals. The optimum substrate temperature to obtain homogeneously inclined c-axis grains in ZnO films is achieved by depositing Al at 100 °C with a surface roughness ~9.2 nm, which caused an inclination angle of ~25° of the ZnO c-axis with respect to the surface normal. Shear mode devices with quality-factors at resonance, Q r and effective electromechanical coupling factors, $${{\boldsymbol{k}}}_{{\bf{eff}}}^{{\bf{2}}}$$ k eff 2 , as high as 180 and 3.4% are respectively measured. Mass sensitivities, S m of (4.9 ± 0.1) kHz · cm2/ng and temperature coefficient of frequency (TCF) of ~−67 ppm/K are obtained using this shear mode. The performance of the devices as viscosity sensors and biosensors is demonstrated by determining the frequency shifts of water-ethanol mixtures and detection of Rabbit immunoglobin G (IgG) whole molecule (H&L) respectively.
format	article
author	Girish Rughoobur Mario DeMiguel-Ramos José-Miguel Escolano Enrique Iborra Andrew John Flewitt
author_facet	Girish Rughoobur Mario DeMiguel-Ramos José-Miguel Escolano Enrique Iborra Andrew John Flewitt
author_sort	Girish Rughoobur
title	Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes
title_short	Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes
title_full	Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes
title_fullStr	Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes
title_full_unstemmed	Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes
title_sort	gravimetric sensors operating at 1.1 ghz based on inclined c-axis zno grown on textured al electrodes
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/a531ab8843aa4568b39d4ec22873f8b7
work_keys_str_mv	AT girishrughoobur gravimetricsensorsoperatingat11ghzbasedoninclinedcaxisznogrownontexturedalelectrodes AT mariodemiguelramos gravimetricsensorsoperatingat11ghzbasedoninclinedcaxisznogrownontexturedalelectrodes AT josemiguelescolano gravimetricsensorsoperatingat11ghzbasedoninclinedcaxisznogrownontexturedalelectrodes AT enriqueiborra gravimetricsensorsoperatingat11ghzbasedoninclinedcaxisznogrownontexturedalelectrodes AT andrewjohnflewitt gravimetricsensorsoperatingat11ghzbasedoninclinedcaxisznogrownontexturedalelectrodes
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Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes

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