Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes

Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes

Abstract Shear mode solidly mounted resonators (SMRs) are fabricated using an inclined c-axis ZnO grown on a rough Al electrode. The roughness of the Al surface is controlled by changing the substrate temperature during the deposition process to promote the growth of inclined ZnO microcrystals. The...

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Autores principales: Girish Rughoobur, Mario DeMiguel-Ramos, José-Miguel Escolano, Enrique Iborra, Andrew John Flewitt
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2017
Materias:
Medicine
R
Science
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Acceso en línea:https://doaj.org/article/a531ab8843aa4568b39d4ec22873f8b7
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