Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes
Abstract Shear mode solidly mounted resonators (SMRs) are fabricated using an inclined c-axis ZnO grown on a rough Al electrode. The roughness of the Al surface is controlled by changing the substrate temperature during the deposition process to promote the growth of inclined ZnO microcrystals. The...
Saved in:
| Main Authors: | , , , , |
|---|---|
| Format: | article |
| Language: | EN |
| Published: |
Nature Portfolio
2017
|
| Subjects: | |
| Online Access: | https://doaj.org/article/a531ab8843aa4568b39d4ec22873f8b7 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|