Femtosecond laser micromachining of an optofluidics-based monolithic whispering-gallery mode resonator coupled to a suspended waveguide

Abstract A monolithic lab-on-a-chip fabricated by femtosecond laser micromachining capable of label-free biosensing is reported. The device is entirely made of fused silica, and consists of a microdisk resonator integrated inside a microfluidic channel. Whispering gallery modes are excited by the ev...

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Autores principales:	João M. Maia, Vítor A. Amorim, Duarte Viveiros, P. V. S. Marques
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/a5d6caaeb3be4d329b42686cc3e964b1
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spelling	oai:doaj.org-article:a5d6caaeb3be4d329b42686cc3e964b12021-12-02T16:55:34ZFemtosecond laser micromachining of an optofluidics-based monolithic whispering-gallery mode resonator coupled to a suspended waveguide10.1038/s41598-021-88682-x2045-2322https://doaj.org/article/a5d6caaeb3be4d329b42686cc3e964b12021-04-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-88682-xhttps://doaj.org/toc/2045-2322Abstract A monolithic lab-on-a-chip fabricated by femtosecond laser micromachining capable of label-free biosensing is reported. The device is entirely made of fused silica, and consists of a microdisk resonator integrated inside a microfluidic channel. Whispering gallery modes are excited by the evanescent field of a circular suspended waveguide, also incorporated within the channel. Thermal annealing is performed to decrease the surface roughness of the microstructures to a nanometric scale, thereby reducing intrinsic losses and maximizing the Q-factor. Further, thermally-induced morphing is used to position, with submicrometric precision, the suspended waveguide tangent to the microresonator to enhance the spatial overlap between the evanescent field of both optical modes. With this fabrication method and geometry, the alignment between the waveguide and the resonator is robust and guaranteed at all instances. A maximum sensitivity of 121.5 nm/RIU was obtained at a refractive index of 1.363, whereas near the refractive index range of water-based solutions the sensitivity is 40 nm/RIU. A high Q-factor of 105 is kept throughout the entire measurement range.João M. MaiaVítor A. AmorimDuarte ViveirosP. V. S. MarquesNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-10 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q João M. Maia Vítor A. Amorim Duarte Viveiros P. V. S. Marques Femtosecond laser micromachining of an optofluidics-based monolithic whispering-gallery mode resonator coupled to a suspended waveguide
description	Abstract A monolithic lab-on-a-chip fabricated by femtosecond laser micromachining capable of label-free biosensing is reported. The device is entirely made of fused silica, and consists of a microdisk resonator integrated inside a microfluidic channel. Whispering gallery modes are excited by the evanescent field of a circular suspended waveguide, also incorporated within the channel. Thermal annealing is performed to decrease the surface roughness of the microstructures to a nanometric scale, thereby reducing intrinsic losses and maximizing the Q-factor. Further, thermally-induced morphing is used to position, with submicrometric precision, the suspended waveguide tangent to the microresonator to enhance the spatial overlap between the evanescent field of both optical modes. With this fabrication method and geometry, the alignment between the waveguide and the resonator is robust and guaranteed at all instances. A maximum sensitivity of 121.5 nm/RIU was obtained at a refractive index of 1.363, whereas near the refractive index range of water-based solutions the sensitivity is 40 nm/RIU. A high Q-factor of 105 is kept throughout the entire measurement range.
format	article
author	João M. Maia Vítor A. Amorim Duarte Viveiros P. V. S. Marques
author_facet	João M. Maia Vítor A. Amorim Duarte Viveiros P. V. S. Marques
author_sort	João M. Maia
title	Femtosecond laser micromachining of an optofluidics-based monolithic whispering-gallery mode resonator coupled to a suspended waveguide
title_short	Femtosecond laser micromachining of an optofluidics-based monolithic whispering-gallery mode resonator coupled to a suspended waveguide
title_full	Femtosecond laser micromachining of an optofluidics-based monolithic whispering-gallery mode resonator coupled to a suspended waveguide
title_fullStr	Femtosecond laser micromachining of an optofluidics-based monolithic whispering-gallery mode resonator coupled to a suspended waveguide
title_full_unstemmed	Femtosecond laser micromachining of an optofluidics-based monolithic whispering-gallery mode resonator coupled to a suspended waveguide
title_sort	femtosecond laser micromachining of an optofluidics-based monolithic whispering-gallery mode resonator coupled to a suspended waveguide
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/a5d6caaeb3be4d329b42686cc3e964b1
work_keys_str_mv	AT joaommaia femtosecondlasermicromachiningofanoptofluidicsbasedmonolithicwhisperinggallerymoderesonatorcoupledtoasuspendedwaveguide AT vitoraamorim femtosecondlasermicromachiningofanoptofluidicsbasedmonolithicwhisperinggallerymoderesonatorcoupledtoasuspendedwaveguide AT duarteviveiros femtosecondlasermicromachiningofanoptofluidicsbasedmonolithicwhisperinggallerymoderesonatorcoupledtoasuspendedwaveguide AT pvsmarques femtosecondlasermicromachiningofanoptofluidicsbasedmonolithicwhisperinggallerymoderesonatorcoupledtoasuspendedwaveguide
_version_	1718382817668235264

Femtosecond laser micromachining of an optofluidics-based monolithic whispering-gallery mode resonator coupled to a suspended waveguide

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